Deep learning-based microscopic character recognition and defect detection system and method

Abstract

The invention discloses a deep learning-based microscopic character recognition and defect detection system and method. The system comprises a microscopic imaging visual device and a computer which is provided with a microscopic character recognition defect detection system connected with the microscopic imaging visual device. The microscopic character recognition defect detection system comprises a focusing control module, a defect detection module and a character recognition module. The focusing control module is connected with a lifting stepping motor. The defect detection module is used for performing defect detection on a microchip on a sample set strip. The character recognition module is used for recognizing characters of the microchip on the sample set strip. The microscopic character recognition defect detection system outputs defect conditions and character recognition conditions according to defect detection and character recognition. According to the invention, microscopic imaging focusing operation can be automatically realized, the focusing efficiency, focusing quality and subsequent microscopic imaging quality are improved, large-scale, standardized and automatic microchip rapid detection is realized, and defect detection and character recognition are comprehensively realized.

Description

technical field [0001] The invention relates to the field of microchip detection, in particular to a deep learning-based microscopic character recognition and defect detection system and method. Background technique [0002] With the development of modern industry, integrated circuits are not only becoming larger in scale, but also require increasing precision. Among them, the chip is an indispensable part of the large-scale integrated circuit. While its functions are becoming more and more powerful, its tasks in the system are also developing towards diversification and complexity. Microchips are a very important type of special chips in the information age. . Different from large-scale and large-area chips such as traditional CPUs, single-chip microcomputers, and FPGAs, microchips are very small, and their cross-sectional areas are often only tens of square millimeters or less. However, in actual industrial production and scientific research, microchips have important fun...

AI Technical Summary

Problems solved by technology

[0003] For the following technical problems in the existing technology: the positioning and focusing difficulties caused by the tiny chip, the recognition accuracy of the traditional method is not high, and manual participation is required; the traditional method does not correct the defects (such as stains and damage, etc.) ) detection, it is impossible to trace the source and correct the error of the production process; the purpose of the present invention is to provide a microscopic character recognition and defect detection system and method based on deep learning, which can automatically realize the microscopic imaging focusing operation, and improve the focusing efficiency. Focusing quality and follow-up microscopic imaging quality realize large-scale, standardized and automated rapid detection of microchips and comprehensively realize defect detection and character recognition, quickly obtain microscopic character recognition defect data, easily identify and count alarm signals and locate them The problem of this batch of microchips is of great significance to improving the yield rate of microchips

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