Surface acoustic wave temperature and pressure two-parameter sensing device and preparation method thereof

Abstract

The invention discloses a surface acoustic wave temperature and pressure two-parameter sensing device and a preparation method thereof. The device comprises a first high-temperature-resistant substrate and a second high-temperature-resistant substrate which are bonded together. A groove is formed in the second high-temperature-resistant substrate, so that a sealed cavity is formed between the first high-temperature-resistant substrate and the second high-temperature-resistant substrate; a first surface acoustic wave temperature sensor and a surface acoustic wave pressure sensor are formed on a first surface, located in the cavity, of the first high-temperature-resistant substrate, and a second surface acoustic wave temperature sensor is formed on a second surface, opposite to the first surface, of the first high-temperature-resistant substrate; and the first surface acoustic wave temperature sensor, the second surface acoustic wave temperature sensor and the surface acoustic wave pressure sensor are electrically connected with one another. The working temperature of the temperature and pressure sensors can be effectively increased, and real-time health monitoring on components in a high-temperature environment is achieved.

Description

technical field [0001] The invention relates to the technical field of surface acoustic wave devices, in particular to a surface acoustic wave temperature and pressure dual-parameter sensing device and a preparation method thereof. Background technique [0002] With the development of aerospace technology, the performance of rocket engines has also been continuously improved, making the working temperature and pressure of complex components such as engine blades, rotor parts, impellers, and test pieces continue to increase. [0003] During the working process of the components, the high pressure and high heat generated by the high-speed flowing gas are easy to cause damage to the components, and the repair is extremely difficult. Therefore, by detecting parameters such as temperature and pressure of components in real time, real-time monitoring of the working strength of components can be realized to reduce the damage rate of components. [0004] The maximum operating tempe...

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Problems solved by technology

Therefore, the existing temperature sensors and pressure sensors cannot be applied to rocket engines, and real-time health monitoring of components cannot be realized.

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