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Semiconductor device

A technology of semiconductors and doped regions, applied in the field of complementary bipolar junction transistors, which can solve the problem that temperature sensors cannot be placed

Pending Publication Date: 2022-02-22
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Known temperature sensors may require additional process operations and cannot be placed close enough to hot spots in integrated circuit (IC) devices
While these known temperature sensors are generally adequate for the intended purpose, they are not completely satisfactory in all respects.

Method used

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  • Semiconductor device
  • Semiconductor device
  • Semiconductor device

Examples

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Embodiment Construction

[0063] The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and arrangements, etc., are described below to simplify the present disclosure. Of course, multiple is merely an example and is not intended to be limiting. For example, forming a first feature on or over a second feature in the following description may include embodiments where the first and second features are formed in direct contact, and may also include embodiments where the first and second features may be in between. Embodiments in which additional features are formed such that the first and second features may not be in direct contact. Additionally, the present disclosure may repeat reference numerals and / or letters in various instances. This repetition is for the sake of simplicity and clarity and does not in itself represent a relationship between the various embodiments and / or configura...

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PUM

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Abstract

Embodiments of a semiconductor device, such as a complementary bipolar junction transistor structure, are provided. A semiconductor device according to the present disclosure includes a dielectric layer and a fin-like structure disposed on the dielectric layer. The fin-shaped structure includes a first p-type doped region, a second p-type doped region, and a third p-type doped region, and a first n-type doped region, a second n-type doped region, and a third n-type doped region, which are interleaved among the first p-type doped region, the second p-type doped region, and the third p-type doped region. The first p-type doped region, the third p-type doped region and the third n-type doped region are electrically coupled to a first potential. The second p-type doped region, the first n-type doped region and the second n-type doped region are electrically coupled to a second potential different from the first potential.

Description

technical field [0001] The present invention relates to semiconductor devices, and more particularly to complementary bipolar junction transistors fabricated together with multi-bridge channel (MBC) transistors as temperature sensors. Background technique [0002] The electronics industry is faced with an increasing demand for smaller and faster electronic devices that simultaneously need to support a large number of increasingly complex and sophisticated functions. Accordingly, there is a continuing trend in the semiconductor industry to manufacture low cost, high performance, and low power integrated circuits (ICs). Most of these goals have thus far been achieved by shrinking the size (eg, minimum feature size) of semiconductor ICs, thereby improving process efficiency and reducing associated costs. However, such scaling down also increases the complexity of the semiconductor process. Accordingly, similar advances in semiconductor processes and technologies are required ...

Claims

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Application Information

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IPC IPC(8): H01L27/06H01L21/8249G01K7/01
CPCH01L27/0688H01L21/8249G01K7/015H01L23/5286H01L27/0623H01L27/082H01L21/8228H01L29/0673H01L29/775H01L29/66439H01L29/735H01L29/6625H01L27/0826H01L29/165H01L21/82285H01L29/66242H01L21/02603H01L21/02532H01L21/26513H01L29/7371
Inventor 苏子昂李明轩吴杼桦叶致锴王智弘谢文兴
Owner TAIWAN SEMICON MFG CO LTD