SEMICONDUCTOR DEVICE and NONVOLATILE MEMORY DEVICE INCLUDING THE SAME
A semiconductor and device technology, applied in the field of semiconductor devices
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[0031] In the following, reference will be made to Figure 1 to Figure 8 Semiconductor devices according to some embodiments are illustrated.
[0032] figure 1 is a layout diagram for illustrating a semiconductor device according to some embodiments. figure 2 is along figure 1 A schematic cross-sectional view taken along the line A-A'. Figure 3a and Figure 3b Yes figure 2 Various magnifications of the region R1.
[0033] refer to figure 1 , figure 2 and Figure 3a , the semiconductor device according to some embodiments may include a first substrate 100 , an element isolation film 110 , first to third circuit elements TR1 , TR2 and TR3 , an interlayer insulating film 150 , a gate contact 142 , a source / drain contact portion 144 and isolation contact portion 146 . For ease of explanation, figure 1 The gate contact 142 is not shown.
[0034] The first substrate 100 may include, but is not limited to, a base substrate and an epitaxial layer grown on the base subs...
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