Microbolometer with reduced pixel pitch

Abstract

The present disclosure relates to a microbolometer comprising an array of pixels, each pixel comprising one or more detection units, each detection unit comprising an absorbing layer (530), in which: the detection units are spaced in at least one direction in the plane of the array of pixels between 5 and 11 [mu] m; the absorption layer (530) of one or more detection cells in each pixel has a pixel fill factor FF in the range of 0.10 to 0.50; and the sheet resistance Rs of the absorption layer (530) of each detection cell is between 16 and 189 ohm / sq.

Description

[0001] Cross References to Related Applications [0002] This patent application claims priority from the French patent application filed on June 5, 2019 and assigned application number FR1905962, the content of which is incorporated herein by reference. technical field [0003] The present disclosure relates generally to the field of infrared imaging, and in particular to a microbolometer and a method of making a microbolometer. Background technique [0004] A microbolometer is an uncooled infrared (IR) camera used to capture thermal images of imaged scenes. Such infrared cameras typically comprise an arrangement of infrared sensitive detectors forming an array of pixels. Each pixel of the pixel array converts the temperature measured at the pixel into a corresponding electrical signal, usually a voltage, which in turn is converted by an ADC (Analog to Digital Converter) into a digital output signal. [0005] Each pixel of a microbolometer consists of a membrane suspended...

AI Technical Summary

Problems solved by technology

[0007] However, there are technical problems in reducing the size and / or cost of microbolometers without reducing their sensitivity

In fact, the smaller the pixel pitch of a microbolometer, the lower the amount of absorbed power and the more difficult it is to design an arm to support an absorbing layer with a relatively high thermal resistance

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