Combustor control method and device
A control method and burner technology, which is applied in the field of semiconductors, can solve problems such as fan damage, and achieve a reasonable effect of combustion-supporting gas flow control
Pending Publication Date: 2022-03-15
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Problems solved by technology
[0003] The invention provides a control method and device for a burner, which is used to solve the defect in the prior art that a frequency converter or a control valve is used alone to control the flow of combustion-supporting gas. When the flow rate is low, it is easy to cause damage to the fan. Different control methods, control the flow of combustion-supporting gas in different modes, and use the regulating valve to control the flow of combustion-supporting gas together with the frequency converter, avoiding the need to use the frequency converter alone to control the flow of combustion-supporting gas. When the required flow is low, the fan operates in a low frequency range , the problem of causing damage to the fan, and the use of the control valve alone to control the flow rate, when the flow rate is low, the fan is held back by the pressure, causing the problem of fan damage
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[0041] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.
[0042] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right" , "vertical", "horizontal", "top", "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing this The embodiments and simplified descriptions of the invention do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as lim...
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The invention relates to the technical field of semiconductors, in particular to a control method and device for a combustor, and the control method for the combustor comprises an ignition control mode: adjusting the opening degree of an adjusting valve; determining that the flow value of the combustion-supporting gas is equal to a first set flow value; the opening degree of the adjusting valve is fixed, and an operation control mode is started; an operation control mode: adjusting the frequency of the frequency converter; determining that the flow value of the combustion-supporting gas is equal to a second set flow value; the frequency of the frequency converter is fixed. Different control methods are adopted according to different modes, and the flow of the combustion-supporting gas in different modes is controlled by setting different first set flow values and second set flow values. And meanwhile, the regulating valve and the frequency converter are adopted for common control, so that the problem that the fan is damaged due to the fact that the fan runs in a low-frequency interval when the required flow is low when the frequency converter is independently used for controlling the flow of the combustion-supporting gas is solved, and the problem that the fan is damaged due to pressure building of the fan when the flow is low when the control valve is independently used for controlling the flow is solved.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method and device for controlling a burner. Background technique [0002] Combustion type exhaust gas treatment devices are widely used among exhaust gas treatment devices used in semiconductor manufacturing, liquid crystal panel manufacturing, etc. The heat source of the combustion exhaust gas treatment device is provided by gas and air combustion. At present, the combustion-supporting gas used in the semiconductor waste gas treatment device is compressed air, and the combustion-type waste gas treatment device needs to use compressed air as the combustion-supporting gas, which consumes a lot of energy and costs high. Moreover, using the frequency converter to control the flow alone will cause the fan to run in the low frequency range when the flow rate is low, which will cause damage to the fan. Using the control valve alone to control the flow rate will cause the fan ...
Claims
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Login to View More IPC IPC(8): F23G7/06F23G5/12F23G5/50
CPCF23G7/06F23G5/12F23G5/50F23G2209/14
Inventor 杨春涛杨春水张坤
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD