Manipulator capable of preventing wafer flower basket from falling off during clamping and having alarm function

A wafer and anti-shedding technology, applied in the field of manipulators, can solve the problems of uneven clamping arm force, wafer box falling off, loose fastenings, etc., to reduce the probability of looseness, ensure safe production, and have good synchronization. Effect

Active Publication Date: 2022-04-01
ZHICHENG SEMICON EQUIP TECH (KUNSHAN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003]However, in the actual use of the existing technology, the fastening part will be loosened due to long-term use, and the clamping arm strength on bo

Method used

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  • Manipulator capable of preventing wafer flower basket from falling off during clamping and having alarm function
  • Manipulator capable of preventing wafer flower basket from falling off during clamping and having alarm function
  • Manipulator capable of preventing wafer flower basket from falling off during clamping and having alarm function

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Embodiment Construction

[0030] The technical solutions of the present invention will be apparent from the technical solutions of the present invention in conjunction with the present invention.

[0031] See Figure 1-6 In this embodiment, a robotic manner having a wafer flower basket clamping and alarm function comprises a rotary assembly, a rotating rod, a bearing positioning, a buffer assembly, and a camptographic wafer 9 secured to the lifting shaft 1. The clamping assembly of the basket 10, and alarm flash 22 and the touched sensing block 23 for monitoring the clamping assembly and the rotary rod, and the inductive sensing block 23, the rotating rod comprises the left side of the rotary rod 4 and the right side of the rotary rod 7.

[0032] See figure 2 and Figure 5 The rotational assembly includes a top pilot cylinder 19, a sliding slider 17, a rotating seat, a pin shaft 12, a rolling sphere 13, and a reset tension spring 14, and the top push cylinder 19. The ramp slider 17 rear end surface is solid-...

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Abstract

The invention discloses a wafer basket clamping anti-falling manipulator with an alarm function, which comprises a rotating assembly fixed on a lifting shaft, a rotating rod, a bearing positioning seat, a buffer assembly, a clamping assembly for taking and placing a wafer basket, an alarm flash lamp and a touch sensing sheet, the rotating assembly comprises a pushing air cylinder, an inclined plane sliding block, rotating seats arranged in a bilateral symmetry mode, a pin shaft and a rolling ball, the two ends of the rotating rod are matched with the bearing positioning seats for positioning, one end of the rotating rod is fixedly connected with the rotating assembly, and the other end of the rotating rod is connected with the clamping jaw through the buffering assembly, and the clamping jaw comprises a locking block, a fastening nut, a clamping rod and a clamping arm. According to the mechanical arm, the clamping arm is secondarily fastened through the fastening nut, meanwhile, the clamping arm is fixedly locked on the rotating rod in cooperation with the buffering assembly, secondary locking is conducted between the rotating rod and the locking block, and the touch sensing piece can toggle a switch in the alarm flash lamp to give out flash alarm. And the effects of prevention and alarm are achieved.

Description

Technical field [0001] The present invention relates to the technical field of automatic semiconductor wafer automatic cleaning equipment, and in particular, a robotic manner involving a wafer flower basket clamping and alarm function. Background technique [0002] The patent of our company is applying for 201920702566.7 discloses a robotic device for clamping the wafer, a symmetrical clamping arm, a rotary arm, and a rotary brake assembly and a transmission displacement assembly, two clamping arms The side of the cassette is firmly held and the locking block is laminated with the rotating rod, and the rotary brake assembly includes a housing, a front baffle, a front shaft, a front bearing, a rotating block, and a rear bearing, a rear shaft seat, a housing The internal fixation is provided with a tip-reducing gas cylinder. The top rod is tilted, and the U-shaped hole is provided in the middle of the inclined block, and the u-shaped hole and the cylindrical transition bar provided...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/677
CPCY02P70/50
Inventor 华斌李文轩蔡超王大权
Owner ZHICHENG SEMICON EQUIP TECH (KUNSHAN) CO LTD
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