Manipulator capable of preventing wafer flower basket from falling off during clamping and having alarm function

Abstract

The invention discloses a wafer basket clamping anti-falling manipulator with an alarm function, which comprises a rotating assembly fixed on a lifting shaft, a rotating rod, a bearing positioning seat, a buffer assembly, a clamping assembly for taking and placing a wafer basket, an alarm flash lamp and a touch sensing sheet, the rotating assembly comprises a pushing air cylinder, an inclined plane sliding block, rotating seats arranged in a bilateral symmetry mode, a pin shaft and a rolling ball, the two ends of the rotating rod are matched with the bearing positioning seats for positioning, one end of the rotating rod is fixedly connected with the rotating assembly, and the other end of the rotating rod is connected with the clamping jaw through the buffering assembly, and the clamping jaw comprises a locking block, a fastening nut, a clamping rod and a clamping arm. According to the mechanical arm, the clamping arm is secondarily fastened through the fastening nut, meanwhile, the clamping arm is fixedly locked on the rotating rod in cooperation with the buffering assembly, secondary locking is conducted between the rotating rod and the locking block, and the touch sensing piece can toggle a switch in the alarm flash lamp to give out flash alarm. And the effects of prevention and alarm are achieved.

Description

Technical field [0001] The present invention relates to the technical field of automatic semiconductor wafer automatic cleaning equipment, and in particular, a robotic manner involving a wafer flower basket clamping and alarm function. Background technique [0002] The patent of our company is applying for 201920702566.7 discloses a robotic device for clamping the wafer, a symmetrical clamping arm, a rotary arm, and a rotary brake assembly and a transmission displacement assembly, two clamping arms The side of the cassette is firmly held and the locking block is laminated with the rotating rod, and the rotary brake assembly includes a housing, a front baffle, a front shaft, a front bearing, a rotating block, and a rear bearing, a rear shaft seat, a housing The internal fixation is provided with a tip-reducing gas cylinder. The top rod is tilted, and the U-shaped hole is provided in the middle of the inclined block, and the u-shaped hole and the cylindrical transition bar provided...

AI Technical Summary

Problems solved by technology

[0003]However, in the actual use of the existing technology, the fastening part will be loosened due to long-term use, and the clamping arm strength on both sides will be caused by the loosening of the fastening part. Unevenness, which will cause the clamped wafer box to fall off, causing irreparable losses

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