Wafer transfer box unlocking and door opening system for wafer loader

Abstract

The invention discloses a wafer loading box unlocking and door opening system for a wafer loader, which comprises a rack of the wafer loader, an interface is arranged on the rack, a door opening device is arranged, the door opening device comprises a pick-and-place assembly, an unlocking assembly and a connecting plate, the pick-and-place assembly is fixedly connected with the connecting plate, the connecting plate is arranged corresponding to the interface, and the unlocking assembly is arranged on the rack. Meanwhile, the cross-connecting plate is in butt joint with the sealing door of the wafer loading box, the unlocking assembly is arranged on the cross-connecting plate, the sealing door of the wafer loading box and the box body are unlocked through the unlocking assembly, and the taking and placing assembly drives the cross-connecting plate and the cross-connecting port to be opened and closed, so that the sealing door of the wafer loading box is taken and placed through the cross-connecting port. Through combination of the pick-and-place assembly and the unlocking assembly, the motion route of the door opening device is limited, the degree of freedom of motion is reduced, functions needing to be completed by three driving parts are reduced into two functions, the space structure is simplified, control is easy, the reliability of wafer loading action is improved, and modular design of the sealing door pick-and-place mechanism of the wafer loading box is achieved.

Description

technical field [0001] The invention relates to the field of semiconductor processing equipment, in particular to a system for unlocking and opening a door of a wafer transfer box of a wafer loader. Background technique [0002] A wafer loading box is a container used to protect, transport, and store wafers in semiconductor manufacturing processes. Generally, it can accommodate a certain number of wafers inside, and its main component is a front that can accommodate 25 wafers. The open container has a front-opening airtight door for the opening and closing of the container, and is an important carrier container used in the automatic transfer system in the fab. When the wafer needs to be loaded into the process equipment for processing, special equipment is required to open the sealed door of the front-opening wafer loading box for subsequent loading. [0003] However, in the prior art, the structure for opening the airtight door requires three driving parts, and the action ...

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Problems solved by technology

[0003] However, in the prior art, the structure for opening the airtight door requires three driving parts, and the action route for placing the airtight door at a designated position is completely fixed. The setting of the three driving parts makes the degree of freedom of movement relatively large. It makes the space structure complex, the control is also complicated, and the reliability will be reduced

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