Calibration compensation method for height mapping based on path
A technology of height and path, which is applied in the field of 3D inspection, can solve the problems of repeated test accuracy reduction of inspection equipment, achieve the effect of suppressing distortion, suppressing sinusoidal distortion, and ensuring consistency
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[0012] The specific implementation manner of the present invention will be further described below in conjunction with the accompanying drawings, so as to describe the technical solution of the present invention in detail.
[0013] Such as figure 1 with figure 2 As shown, the mechanism of the detection device adopted in the present invention includes a motion control platform, a camera, a projection unit and a calibration block. The motion control platform is controlled by servo motors in the X and Y directions and a stepping motor in the Z-axis direction. The vision system is composed of multiple projection units and cameras. The projection unit can be a digital projector or a group of The grating projection device composed of straight mirror group, sinusoidal grating and projection lens is mainly used to project sinusoidal light stripes to the surface of the detection object, and then observe each observation point through the camera, and process the observation data, and...
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