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Cutter replacing device

A tool replacement and tool mounting seat technology, which is applied to positioning devices, devices for fixing grinding wheels, fine working devices, etc., can solve problems such as damage to flanges and tool damage without hubs

Pending Publication Date: 2022-07-01
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, the hubless cutter may be damaged or the flange part may be damaged.

Method used

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  • Cutter replacing device
  • Cutter replacing device
  • Cutter replacing device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] An embodiment of one embodiment of the present invention will be described with reference to the drawings. figure 1 It is a perspective view of the cutting apparatus 2 of 1st Embodiment. figure 1 The indicated X-axis direction (machining feed direction), Y-axis direction (indexing feed direction), and Z-axis direction (vertical direction, vertical direction) are mutually perpendicular directions.

[0039] In addition, in figure 1 In , a part of the structural element is represented by a functional block. The cutting device 2 has a base 4 that supports each component. A lifter 6 that is raised and lowered by a lift mechanism (not shown) is provided at a corner of the base 4 .

[0040] The cassette 8 is mounted on the upper surface of the lift table 6 a of the lifter 6 . In the cassette 8, a plurality of pairs of support plates 8a capable of supporting one workpiece 11, respectively, are arranged at predetermined intervals along the height direction of the cassette 8....

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PUM

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Abstract

The invention provides a tool changing device which prevents cutting tools and flange parts from being damaged under the condition that the cutting tools with different blade thicknesses are mounted on a tool mounting seat. The cutter replacing device used in the cutting device is provided with: a holding part for detachably holding one surface side of a cutting cutter; and a moving unit that moves the holding unit in a state in which the cutting tool is held back and forth relative to the main shaft in the axial direction of the main shaft. Positioning the holding part at least at a mounting position in which the other surface on the opposite side of the one surface of the cutting tool is at a predetermined distance or less from the flange part of the tool mounting seat, and at a separation position in which the cutting tool is separated from the tool mounting seat; and a thickness information acquisition unit for acquiring information on the thickness of the cutting tool, the mounting position of the holding unit being adjusted according to the thickness of the cutting tool acquired by the thickness information acquisition unit.

Description

technical field [0001] The present invention relates to a tool changer for use in a cutting device. Background technique [0002] In order to divide a semiconductor wafer such as silicon having a plurality of devices formed on the front side into individual device chips, a cutting apparatus having an annular cutting tool is used. This cutting tool is a consumable item and needs to be replaced appropriately according to the degree of wear and the like. [0003] For example, when the operator manually replaces the cutting tool, after removing the used cutting tool from the tool mount fixed to the front end of the spindle, a new cutting tool is mounted on the tool mount. [0004] When mounting, first, the boss portion of the tool mount is inserted into the through hole of the cutting tool. Next, with the cutting tool in contact with the flange portion of the tool mount, the boss portion is inserted into the press nut, and the press nut is fastened to the thread groove on the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B45/00B24B49/12B24B49/00
CPCB24B45/006B24B45/003B24B49/12B24B49/00B26D7/2621B23Q3/157B24B27/06B24B49/02B28D5/022H01L21/67092B23Q2003/155418Y10T483/132Y10T483/174
Inventor 寺田一贵
Owner DISCO CORP