Method for detecting wafer of virtual interaction equipment

Abstract

The invention discloses a virtual interaction device wafer detection method, which comprises a visual detection device, the visual detection device comprises a wafer carrier, an image acquisition unit, a comprehensive driving adjustment unit, an image comparison database and a comparison analysis unit, and the method comprises the following steps: importing wafer chip position data into the comprehensive driving adjustment unit; driving to realize phase switching alignment adjustment of the image acquisition unit and any chip on the wafer; and performing image acquisition, comparison and analysis on each chip, and then generating a defect distribution diagram. According to the invention, the automatic detection requirement of irregular chip arrangement wafers is met, image acquisition station switching is realized through wafer chip position data, and respective acquisition and detection of all chip images are realized. A defect distribution diagram can be generated, physical marking is not needed, the risk of wafer pollution and damage is reduced, and meanwhile intelligent recognition can be easily carried out in a back-end process. The detection efficiency and the detection precision are greatly improved, meanwhile, detection standard control is easy to achieve, and high economic value is achieved.

Description

technical field [0001] The invention relates to a method for detecting a virtual interactive device wafer, and belongs to the technical field of wafer detection with irregularly arranged chips in an AR / VR virtual interactive device. Background technique [0002] Wafer refers to the silicon wafer used in the manufacture of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer; it can be processed into various circuit element structures on the silicon wafer, and become an IC with specific electrical functions. product. The original material of the wafer is silicon, and the surface of the earth's crust has an inexhaustible amount of silicon dioxide. Silica ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to produce high-purity polysilicon. [0003] The traditional distribution of chips on a wafer is a matrix-like regular distribution, but during wafer inspection, it is only necessary to align...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the above-mentioned deficiencies in the prior art, aiming at the problem that automatic detection equipment cannot meet the automatic detection of wafers with irregularly arranged chips, and proposes a detection method for virtual interactive equipment wafers

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