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Temperature detection mechanism and coating equipment with same

A technology of workpiece racks and rotating components, applied in the application of thermometers, parts of thermometers, thermometers, etc., can solve the problem of a large number of temperature detection mechanisms

Pending Publication Date: 2022-07-19
广东华升纳米科技股份有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] Based on this, it is necessary to provide a temperature detection mechanism and a coating device with the temperature detection mechanism, aiming to solve the problem of a large number of temperature detection mechanisms in the prior art

Method used

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  • Temperature detection mechanism and coating equipment with same
  • Temperature detection mechanism and coating equipment with same
  • Temperature detection mechanism and coating equipment with same

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Embodiment Construction

[0024] In order to make the above objects, features and advantages of the present application more clearly understood, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of this application; the terms used herein are for the purpose of describing specific embodim...

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Abstract

The invention relates to a temperature detecting mechanism and coating equipment with the temperature detecting mechanism, the temperature detecting mechanism comprises temperature detecting pieces, a workpiece frame and a rotating assembly, the workpiece frame is detachably connected with the rotating assembly and is driven by the rotating assembly to rotate, and the workpiece frame is provided with at least one temperature detecting piece. According to the scheme, the temperature detecting piece is connected to the workpiece frame, the workpiece frame is driven by the rotating assembly to rotate, the temperature detecting piece connected with the workpiece frame is driven to rotate along with the workpiece frame, the temperature detecting piece is made to be close to different modules, the temperature of the different modules is detected through the temperature detecting piece, and the temperature detecting piece is detachably connected with the workpiece frame through the rotating assembly. And the temperature detection mechanism is convenient to mount and dismount.

Description

technical field [0001] The present application relates to the technical field of coating equipment, in particular to a temperature detection mechanism and a coating equipment with the temperature detection mechanism. Background technique [0002] The vacuum coating machine is used to coat the substrate under high vacuum, and the temperature in the coating chamber can be obtained in real time through the temperature detection mechanism. In the same coating chamber, multiple modules of different processes can be included. The functional configuration of each module is different, and the required temperature is also different. In the prior art, the temperature detection mechanism of the coating machine is installed on each module, and can only measure the temperature of a certain position fixedly. The number of temperature detection mechanisms required is large, and the maintenance cost is high. SUMMARY OF THE INVENTION [0003] Based on this, it is necessary to provide a t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K1/14G01K13/00C23C14/54
CPCG01K1/14G01K13/00C23C14/54
Inventor 杨恺林海天李立升
Owner 广东华升纳米科技股份有限公司
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