The invention relates to a method for reducing acoustic vibrations in a connection element (30, 50, 70), wherein the connection element (30, 50, 70) connects two components of a projection
exposure system to one another, and the connection element (30, 50, 70) is filled with a fluid (34), the method comprising the following method steps: - determining acoustic vibrations expected in the connection element (30, 50, 70); - configuring the connection element (30, 50, 70) to at least partially reduce the acoustic vibrations expected in the connection element (30, 50, 70); - determining an
acoustic transfer function (37) of the configured connection element (30, 50, 70); - comparing the achieved reduction with a predetermined specification based on the
transfer function (37); - repeating the configuration of the connection element (30, 50, 70) and the subsequent method steps until the specification is satisfied. The invention also relates to a connection element (30, 50, 70) for connecting two components of a projection
exposure system (1, 101), wherein the connection element (30, 50, 70) is filled with a fluid (34) and is characterised in that the connection element (30, 50, 70) comprises at least one vibration-reducing portion (40, 40.1, 60, 80, 90). The invention also relates to a projection
exposure system (1, 101) comprising a connection element (30, 50, 70) according to any one of the described embodiments.