Double-layer sine compensation type time grating angular displacement sensor

Abstract

The invention discloses a double-layer sine compensation type time grating angular displacement sensor, which comprises a rotor and a stator, wherein the stator is opposite to and parallel to the rotor and is provided with an air gap; the rotor comprises a rotor base body, a sensing unit and a rotor insulating layer; the stator comprises a stator base body, an excitation unit and a stator insulation layer. The excitation unit comprises three sectors, each sector comprises a first excitation coil and a second excitation coil, every two adjacent sectors are spaced in the circumferential direction, the first excitation coil and the second excitation coil in each sector are spaced in the circumferential direction, sine excitation signals and cosine excitation signals are introduced into the first excitation coil and the second excitation coil respectively for excitation, and the intensity of the induced magnetic field can be effectively enhanced; and the measurement precision of the sensor is improved. The induction coil adopts a double-layer structure and is wound by a plane sine ring curve, so that the induction intensity can be enhanced, the quality of an induction signal is improved, and the measurement precision of the sensor is further improved.

Description

technical field [0001] The invention belongs to the technical field of precision angular displacement measuring sensors, in particular to a double-layer sinusoidal compensation type time grating angular displacement sensor. Background technique [0002] In recent years, a displacement sensor (ie grating displacement sensor) that uses the clock pulse Δt to form the measurement reference has been developed in China. [0003] At present, the magnetic field time grid angle displacement sensors that have been developed include machined wire slot displacement sensors and MEMS process sensors. The machining cost of the machined wire slot sensors is high, it is difficult to increase the number of pairs of poles, and the cost of MEMS process sensors is low. And the machining accuracy is high. Compared with the machined slot-type angular displacement sensor, the use of the MEMS process to manufacture the angular displacement sensor has obvious advantages. However, the sensor coil wou...

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Problems solved by technology

However, the MEMS process is used to wind the sensor coil on a plane, the number of winding turns is limited, the excitation effect and the intensity of the induction signal are relatively low, resulting in a low signal-to-noise ratio of the induction signal, and the use of single-layer winding will bring To induce the decline of the uniformity of the magnetic field, which affects the measurement accuracy of the sensor

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