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Solid-state source gasification device

A technology of gasification device and source gas, which is applied in the field of solid source gasification device, can solve the problems of poor mixing effect of solid steam, short horizontal moving distance, less steam, etc., and achieve the effect of improving the overall gasification efficiency and improving gasification efficiency

Pending Publication Date: 2022-07-29
JIANGSU NATA OPTO ELECTRONICS MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to adopt a series gas transmission channel for the existing solid source gasification device described in the background technology. The gasification efficiency of the solid source material in the upper tray is very low. In each layer of trays, the carrier gas is The horizontal movement distance in the tray is very short, so the mixing effect with solid vapor is poor, the amount of vapor carried in the carrier gas is very small, and the overall vaporization efficiency and transmission efficiency of the solid source gasification device are very low. Provide A new solid source gasification device

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] like Figures 1a-1h The shown solid-state source gasification device includes a casing 1 , several layers of trays 2 and a carrier gas pipe 3 .

[0057] The casing 1 is a corrosion-resistant casing, and a top cover 11 is provided on the top of the casing 1. After the top cover 11 is fixedly connected with the casing 1, an air-tight cavity can be formed in the casing 1. On the top cover 1 An air inlet 12 and an air outlet 13 are provided. In the working state, the shell 1 is heated to a specific temperature, so that the solid source is vaporized to generate steam. The heating of the shell 1 can be realized by a heating device that wraps the shell, or placed in a liquid heating container, or realized by other heating devices.

[0058] The carrier gas pipe 3 is a tubular part, the upper end of the carrier gas pipe 3 is connected to the air inlet on the top cover of the casing, and the bottom of the carrier gas pipe extends to the bottom tray 2 in the casing 1 . A carrie...

Embodiment 2

[0062] like Figures 2a-2d The shown solid source gasification device, on the basis of Example 1, is different from Example 1 in that in the 1st-3rd layer tray 2, the design position of the air guide pipe 21 is located at a position away from the carrier gas pipe 3. Moreover, the air conduits 21 in adjacent trays 2 are staggered by a certain distance, and in each layer of trays 2, the positions of the air conduits 21 are staggered from the air outlet 13 by a certain distance. as attached Figures 2a-2d As shown, there are four layers of trays 2 in the casing 1, and there is no air duct in the fourth layer of trays. In the side position, the air duct 21 in the second-layer tray 2 is designed near the air outlet 13 and is located on the front side.

[0063] In this embodiment, the carrier gas enters the carrier gas pipe 3 from the air inlet 12 , and enters the trays 2 of each layer through the carrier gas outlets on the carrier gas pipe 3 respectively. The surface of the soli...

Embodiment 3

[0065] as attached Figures 3a-3d The shown solid source gasification device, on the basis of the previous embodiment 1, is different from the previous embodiment 1 in that each layer of trays 2 except the bottom tray is provided with a plurality of guides. The trachea 21, the trachea 21 is located away from the carrier gas tube.

[0066] In this embodiment, after the carrier gas is heated outside the solid-state source gasification device, it enters the carrier gas pipe 3 from the air inlet 12, and enters into the trays 2 of each layer through each carrier gas outlet 33 on the carrier gas pipe 3, respectively. The carrier gas is transported along the surface of the solid source material in the tray 2 in each layer of the tray 2 to the position of the air duct 21 of the tray 2 on the upper layer. The content of vapor, thereby improving the volatilization efficiency of solid source substances. Because a plurality of air ducts 21 are arranged in the trays on the first layer to...

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Abstract

The invention discloses a solid-state source gasification device which comprises a shell and a plurality of layers of trays, a top cover is arranged at the top of the shell, a gas inlet and a gas outlet are formed in the top cover, the trays are vertically stacked in the shell, a gas carrying pipe is arranged in the shell, the upper end of the gas carrying pipe is connected with the gas inlet, the gas carrying pipe penetrates through all the layers of trays, and the gas carrying pipe is connected with the gas outlet. A plurality of carrier gas pipes are arranged in the tray and extend into the tray at the bottommost layer, a plurality of carrier gas outlets are formed in the carrier gas pipes, the carrier gas outlets are formed in the cavity of the tray at the bottommost layer or the cavities of the tray at the bottommost layer and the rest of the trays, and a plurality of gas guide pipes are arranged in the rest of the trays except the tray at the bottommost layer. According to the solid-state source gasification device, the gas transmission channels connected in parallel are adopted, after entering the gas carrying pipe from the gas inlet, carrier gas can respectively enter each layer of tray, and can reach the position of the gas guide pipe only after being horizontally transmitted for a long distance along the surface of a solid-state source substance in each layer of tray, so that the carrier gas can carry a large amount of gasification gas; and the overall gasification efficiency of the solid-state source gasification device is improved.

Description

technical field [0001] The present invention relates to the field of solid-state source gasification devices, and in particular to a system for gasifying solid-state precursor materials to deliver precursor vapors such as reaction chambers of chemical vapor deposition equipment, atomic deposition equipment or ion implantation equipment. Solid-state source gasification unit for precursor vapors. Background technique [0002] The structure of the existing solid source gasification device is that there are one or more trays containing solid raw materials inside the sealed container. Connect each tray; in the working state, the sealed container is heated from the outside to the gasification temperature of the solid raw material; the sealed container has an air inlet for the carrier gas, the carrier gas enters from the air inlet, and the carrier gas is fully mixed with the vapor of the solid raw material. It enters the reaction vessel connected with the solid-state source gasifi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C9/02F17C13/00
CPCF17C9/02F17C13/00F17C2225/0123F17C2227/04
Inventor 袁磊杨敏陈化冰沈斌
Owner JIANGSU NATA OPTO ELECTRONICS MATERIAL