Semiconductor structure detection method and device, electronic equipment and readable storage medium
A detection method and detection device technology, applied in image analysis, instruments, calculations, etc., can solve the problems of low accuracy, large individual differences among operators, and low work efficiency, and achieve the effect of improving efficiency and accuracy
Pending Publication Date: 2022-07-29
YANGTZE MEMORY TECH CO LTD
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[0005] However, the above solution requires the operator to artificially observe the image of the semiconductor structure under the optical microscope, not only the work efficiency is not high, but also the individual differences in the observation by the operator are large, and the accuracy is not high
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[0036] For a better understanding of the present application, various aspects of the present application will be described in more detail with reference to the accompanying drawings. It should be understood that these detailed descriptions are merely illustrative of exemplary embodiments of the present application and are not intended to limit the scope of the present application in any way. Throughout the specification, the same reference numerals refer to the same elements. The expression "and / or" includes any and all combinations of one or more of the associated listed items.
[0037] It should be noted that in this specification, the expressions first, second, third, etc. are only used to distinguish one feature from another feature area, and do not represent any limitation on the features, especially any order of precedence. Thus, a first section discussed in this application could also be termed a second section, and vice versa, without departing from the teachings of t...
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The invention provides a semiconductor structure detection method and device, electronic equipment and a readable storage medium. The detection method comprises the following steps: mapping an image of a semiconductor structure from an RGB color space to an HSV color space; determining color distribution of the image of the semiconductor in an HSV color space; and determining the state of the semiconductor structure according to the color distribution of the image of the semiconductor structure. According to the method, the image of the semiconductor structure is mapped from the RGB color space to the HSV color space, so that the visual color of the semiconductor structure can be described by using more visual data, the state of the semiconductor structure is determined by adopting a technical means, and the efficiency and accuracy of state identification of the semiconductor structure are improved.
Description
technical field [0001] The embodiments of the present application relate to the field of semiconductor technology, and more particularly, to a method, apparatus, electronic device, and readable storage medium for detecting a semiconductor structure. Background technique [0002] With the development of science and technology, the research on semiconductor technology has gradually matured, and semiconductor devices have been widely used. [0003] In the production process of the semiconductor device, it is necessary to perform state analysis on the semiconductor structure after some processes to improve the yield of the semiconductor device. [0004] At present, a common method is to identify the color in the image of the semiconductor structure to determine the state of the semiconductor structure as a good die or a bad die. [0005] However, the above solution requires the operator to observe the image of the semiconductor structure under the optical microscope artificiall...
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Login to View More IPC IPC(8): G06T7/00G06T7/90G06T7/136G06K9/62
CPCG06T7/0004G06T7/90G06T7/136G06T2207/10024G06T2207/10061G06T2207/30148G06F18/23
Inventor 王文琪韩烽陈金星汪严莉
Owner YANGTZE MEMORY TECH CO LTD