Recycling method of monocrystalline silicon powder slurry

Abstract

The invention discloses a recovery method of monocrystalline silicon powder slurry, and relates to the related technical field of monocrystalline silicon processing. The method comprises the following steps: S1, powder slurry condensation: mainly condensing monocrystalline silicon powder slurry into large particles; s2, powder slurry filtration: pouring the granular monocrystalline silicon powder slurry into a filter bag for filtration; s3, filtering and precipitating, wherein the filtered granular monocrystalline silicon powder slurry is mainly subjected to precipitating and air-drying work; s4, dust compression, wherein the dust compression is mainly used for conducting filter pressing on the precipitated granular monocrystalline silicon powder slurry to be in a cake shape; and S5, airing and recycling: airing the cake-shaped monocrystalline silicon powder slurry again. Through a series of procedures of powder slurry condensation, powder slurry filtration, filtration and precipitation, dust compression, airing and recycling and the like, the effect of recycling monocrystalline silicon powder slurry is achieved, and meanwhile the problems that fine dust generated in monocrystalline processing in the current market is mixed into a water tank along with cooling liquid and cannot be treated, and the production cost is reduced are solved. And machine tool equipment is easily blocked and damaged after a long time and is difficult to clean.

Description

technical field [0001] The invention belongs to the technical field related to single crystal silicon processing, and in particular relates to a recovery method of single crystal silicon powder slurry. Background technique [0002] Monocrystalline silicon is a relatively active non-metallic element, an important part of crystalline materials, and is at the forefront of the development of new materials. Its main uses are as semiconductor materials and various crystalline materials such as solar photovoltaic power generation and heating, especially the high-tech value-added materials represented by monocrystalline silicon and the development of related high-tech industries, becoming the contemporary information technology industry. The pillar of the information industry, and make the information industry the fastest growing leading industry in the global economic development. As a high-tech resource with great potential and urgent need for development and utilization, monocry...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a recovery method of monocrystalline silicon powder slurry, through a series of processes such as slurry coagulation, slurry filtration, filtration precipitation, dust compression and drying and reuse, so as to achieve single crystal silicon powder slurry The function of reuse also solves the problem that the fine dust generated by single crystal processing in the current market is mixed with the coolant into the water tank and cannot be processed. It is so easy to block and damage the machine tool equipment for a long time, and it is difficult to clean up.