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Method for preparing lithium ion solid electrolyte film with large area

A solid electrolyte, lithium ion technology, applied in the field of preparing nitrided Li3PO4 thin films, can solve the problems of rough surface, poor physical properties of deposited thin films, difficult to popularize and apply all-solid thin film lithium ion batteries, etc., and achieve the effect of high ionic conductivity

Inactive Publication Date: 2005-03-02
FUDAN UNIV
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Problems solved by technology

Since the pressure of nitrogen gas in the deposition process is between 1 and 50 Pa, the physical properties of the deposited film are poor and the surface is rough, so it is difficult to popularize and apply it in the preparation of all-solid-state thin-film lithium-ion batteries.
Before the present invention, there is no report about the combination of electron beam heating method and nitrogen ion source generator to prepare LiPON inorganic electrolyte film

Method used

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Embodiment Construction

[0013] The method of the present invention is further described below by way of examples.

[0014] In an embodiment, an electron beam heating method is used in combination with a nitrogen ion source generator. The implementation of the method is carried out in a vacuum system for electron beam evaporation. First, use a molecular pump to pump the air pressure of the vacuum chamber to 1.0×10 -3 Pa. The vacuum system is also equipped with an ion-coupled plasma (ICP) device. The operating power of the ion-coupled plasma was 250 watts. The high-purity nitrogen gas flow (99.99%) into the ion-coupled plasma chamber is controlled by a needle valve, and the nitrogen plasma generated is freely diffused into the evaporation vacuum chamber, and the direction of the diffusion port is directly on the deposition substrate. Adjust the nitrogen flow to keep the pressure in the vacuum chamber at 2 × 10 -2 Pa. When evaporating, the power output of the electron gun is 400 watts. Substrate ...

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Abstract

The film of lithium, phosphor, oxygen and nitrogen (LiPON) is deposited by using the combination of the electron beam heating method and the mitrogen ion source generator. Comparing with the method of radio frequency magnetron sputtering, the deposited area is increased nearly 10 times. The conductivity of Li ion of the LiPON film prepared by the invention can reach 2-5X10 to the power -6 s / cm. Combining with electrodes of the thin film of Ag0.5V2O5 etc. and the metal Li film electrodes, thin film Li ion battery in full solid state can be assembled.

Description

technical field [0001] The invention relates to a method for preparing a lithium ion solid electrolyte thin film in a large area, in particular to a method for preparing a nitrided Li3PO4 (referred to as lithium phosphorus oxygen nitrogen) thin film, and the prepared thin film can be applied to an all-solid thin film lithium ion battery. preparation. Background technique [0002] With the miniaturization of microelectronic devices, there is an urgent need to develop a miniaturized long-life power supply that matches this. Compared with other chemical batteries, all-solid-state rechargeable and dischargeable lithium-ion thin-film batteries have the characteristics of large specific capacity, long charge and discharge life, and good safety performance. The research and development of all-solid-state rechargeable and dischargeable lithium-ion thin-film batteries has a wide range of application backgrounds. . All-solid-state thin-film lithium-ion batteries can be divided into ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/22H01M2/14H01M10/02
CPCY02E60/10Y02P70/50
Inventor 傅正文秦启宗刘文元赵胜利
Owner FUDAN UNIV
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