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On-line micro-oxygen contant measuring method and special sensor

A measurement method and technology of oxygen content, applied in the direction of material resistance, etc., can solve the problems of no thermal effect and low sensor sensitivity, and achieve the effects of excellent sensitivity, improved sensitivity, and reduced thermal noise.

Inactive Publication Date: 2005-07-27
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the platinum wire is used as a temperature sensor and heater, the output signal is a comprehensive reaction of the thermal effect of the catalytic reaction and the thermal effect of the platinum wire itself (when using a semiconductor oxide, it is also related to the change in the resistance of the oxide), and the real reaction cannot come from the catalytic reaction. In addition, the sensitivity of the sensor is relatively low, and some special processes are required to make the sensor, and there are many factors that affect its performance.

Method used

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  • On-line micro-oxygen contant measuring method and special sensor
  • On-line micro-oxygen contant measuring method and special sensor
  • On-line micro-oxygen contant measuring method and special sensor

Examples

Experimental program
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Effect test

Embodiment 1

[0035] like figure 1 As shown, the bridge of the special sensor of the present invention is composed of the first to fourth resistors R1, R2, R3, R4, wherein: the first to second resistors R1 and R2 are thermistors, which are used as the reference arm of the bridge and measure arm; the third to fourth resistors R3 and R4 are low-temperature drift resistors, forming the other two arms of the bridge. Thermistors R1 and R2 are placed in the reaction pool 3 that is kept constant by the constant temperature device 1 , and the low-temperature drift resistors R3 and R4 of the bridge circuit are outside the constant temperature device 1 .

[0036] according to figure 2 , 3 As shown, two thermistors are respectively placed in the reference cell 35 and the measurement cell 36, and the reference cell 35 and the measurement cell 36 are respectively filled with an inert carrier and a catalyst and embed the thermistor; the reference cell 35 It is separated from the measuring pool 36 by ...

Embodiment 2

[0052] 35 fill glass beads in the reference cell, and other conditions are the same as in Example 1.

Embodiment 3

[0054] Glass beads are filled in the reference pool 35; the measuring pool 36 is filled with palladium asbestos catalyst, and other conditions are the same

[0055] Example 1.

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Abstract

The invention discloses an on-line measuring method of micro-oxygen content and the special sensor. It adopts Wheatstone bridge as measuring circuit, when measuring sample, keeps the reaction pool at a constant reaction temperature, and firstly makes constant-flow oxygenous sample through the reaction pool to adjust the bridge into balance; then adds hydrogen in sample gas, and when the sample gas flows through measuring pool, the catalyzer catalyzes the reaction between hydrogen and oxygen, the heat given-out causing the temperature change, and the temperature change causing the value change of the thermo-sensitive resistances to change the bridge's balance, so as to make the bridge produce responding signal; the sensor includes measuring bridge, measuring pool, reference pool, etc. Thermo-sensitive resistances consist of the measuring and reference arms, placed in the measuring and reference pools, respectively.

Description

technical field [0001] The present invention relates to oxygen content measurement technology, specifically a kind of oxygen content measuring technology for 1~1700×10 -6 On-line trace oxygen content measurement method and special sensor within V / V range. Background technique [0002] The continuous measurement of trace oxygen content in gases is very important in industry, especially in the semiconductor industry and the production of high-purity gases. In the prior art, various sensors have been used to detect trace amounts of oxygen in gas, mainly including electrochemical oxygen sensors, optical fiber oxygen sensors and oxygen sensors based on the paramagnetic properties of oxygen, among which electrochemical oxygen sensors The most widely used. [0003] Electrochemical oxygen sensors can be divided into Galvanic oxygen sensors, oxide semiconductor oxygen sensors and polarographic oxygen sensors according to their working principles. Among them: 1) The Galvanic oxygen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/16
Inventor 关亚风谭峰
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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