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Voltage allocation mode of piezoelectric scanner for scanning-probe microscope

A technology of scanning probe and configuration method, which is applied in the field of scanning probe microscopy, can solve problems such as limited dynamic range, achieve the effects of improving stability, reducing distortion, and simplifying circuits

Inactive Publication Date: 2005-09-28
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, since the scanning range of the piezoelectric scanner is limited by the withstand voltage V of the piezoelectric ceramic tube 0 The limitation of the dynamic range is limited

Method used

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Examples

Experimental program
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Embodiment Construction

[0005] It is necessary to transform the commonly used scanning probe microscope electronic control system or redesign and manufacture the scanning probe microscope electronic control system. In the existing scanning probe microscope electronic control system, find the low-voltage signal output end of the sawtooth wave that controls the X electrode scanning linearly with time. It is divided into two ways: make a general positive high-voltage amplifier circuit (only one positive High-voltage stabilized power supply), which transforms a signal into a positive high-voltage signal V through the amplifier circuit + , To provide voltage for the +X electrode; find the low-voltage signal output terminal that controls the scanning range in the X direction and make a general low-voltage differential circuit, and convert the other path through the low-voltage differential circuit into a low-voltage signal V + *L =V set L -V + L , And then converted into a high voltage signal V by the ampli...

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Abstract

In prior art, the opposite electrodes are applied opposite voltages in sign so as to need two sets of voltage stabilization power sources (positive and negative). Thus, the mismatch of two sets of the power sources, the heat drift and noise cause the distortion of scanned image. The technique scheme used in the invention is as follows. The complement collocating mode is used for the electrode. Voltage V+ and V+* are applied to the pair of the electrode. In the scanning process, the electronic control system controls V++V+*=Vset. The Vset is the voltage for controlling the scanning range set for the system. The invention simplifies the circuit, raises the stability of the scanner, reduces the distortion and increases the dynamic scanning range of the scanner.

Description

Technical field [0001] The invention is a voltage configuration method designed to simplify the power supply system of the piezoelectric scanner of the scanning probe microscope (especially the single-tube piezoelectric ceramic scanner) and improve the performance of the scanner, and belongs to the field of scanning probe microscopes. Background technique [0002] At present, the voltage configuration of the single-tube piezoelectric ceramic scanner of a scanning probe microscope is usually a four-electrode type. The inner wall of the ceramic tube is an integral electrode (Z electrode), which controls the expansion and contraction in the Z direction. The electrodes on the outer wall are divided into four equal parts (+X, -X, +Y, -Y electrodes), and the two opposite electrode pairs on the outer wall respectively control the deflection in the XY direction, which realizes the scanning function of the piezoelectric scanner of the scanning probe microscope . Usually the opposite elect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q10/00H01J37/28
Inventor 张天浩吴朝晖张春平张光寅颜彩繁杨嘉孙磊
Owner NANKAI UNIV
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