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Method for manufacturing nitride luminous apparatus

A technology for a light-emitting device and a manufacturing method, which is applied to electrical components, circuits, semiconductor devices, etc., can solve problems such as poor conductivity, reducing the effective light-emitting area of ​​crystal grains, and increasing the area of ​​P-type and N-type electrodes.

Inactive Publication Date: 2007-03-21
FORMOSA EPITAXY INCORPORATION +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Based on the observation of actual operation, it is found that it has some disadvantages: First, because the substrate itself is insulated and has poor conductivity, it is necessary to place the P-type and N-type electrodes on the same side during fabrication, thus increasing the size of the P-type and N-type electrodes. occupied area, and reduces the effective light-emitting area of ​​the die
Furthermore, since the conductivity of P-type nitrides is much lower than that of N-type nitrides, and the semi-transparent metal conductive layer is used as the ohmic contact layer, although the current can be evenly distributed, it is also due to the existence of the semi-transparent metal conductive layer. And greatly produce light absorption effect, and reduce luminous efficiency

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  • Method for manufacturing nitride luminous apparatus
  • Method for manufacturing nitride luminous apparatus
  • Method for manufacturing nitride luminous apparatus

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Embodiment Construction

[0025] FIG. 1 is a schematic diagram of a nitride light-emitting structure according to an embodiment of a method for manufacturing a nitride light-emitting device of the present invention. The manufacturing method of the nitride light-emitting device of the present invention is provided with a nitride light-emitting structure 20, including: a first substrate 201, the material of which is aluminum oxide (Al 2 o 3 ), the N-type nitride epitaxial layer 203 is an epitaxial structure layer, which is grown and formed on the first substrate 201 by the current epitaxial technology, and the P-type nitride epitaxial layer 205 is also an epitaxial structure layer, and its growth is also It is formed on the N-type nitride epitaxial layer 203 by the same epitaxy technique used for growing the N-type nitride epitaxial layer 203 .

[0026] For later wafer bonding, on the P-type nitride epitaxial layer 205 of the nitride light-emitting structure 20, the first bonding layer 21 is grown to fo...

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Abstract

The invention mainly uses two above metals or alloys as combining layer to combine nitride light-emitting structure growing on low thermal conductivity substrate with high thermal conductivity substrate, eliminating the low thermal conductivity substrate by chemical etching, dry-etching or mechanical grinding method, and replacing the nitride light-emitting structure on the high thermal conductivity substrate. Simultaneously, also by transparent conductive layer and N-type nitriding layer forming ohm contact, largely improving current distribution and reducing light absorbing effect and then increasing light-emitting benefits of light-emitter.

Description

technical field [0001] The present invention relates to a method for manufacturing a nitride light-emitting device, in particular to a manufacturing method for replacing a nitride light-emitting structure with a high thermal conductivity substrate by forming and pressing a bonding layer. Background technique [0002] The known process of making nitride light-emitting devices is based on aluminum oxide (Al 2 o 3 ) is a substrate on which epitaxial growth is performed. Based on the observation of actual operation, it is found that it has some disadvantages: First, because the substrate itself is insulated and has poor conductivity, it is necessary to place the P-type and N-type electrodes on the same side during fabrication, thus increasing the size of the P-type and N-type electrodes. Occupied area, and reduce the effective light-emitting area of ​​the grain. Furthermore, since the conductivity of P-type nitrides is much lower than that of N-type nitrides, and the semi-tra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L33/00
Inventor 杨光能
Owner FORMOSA EPITAXY INCORPORATION