Wafer cleaner

Abstract

The wafer cleaner includes at least a rotary stage to support wafer, a rotating unit to rotate the stage, a movable or fixed bent brush to clean the surface of wafer, a chemical cleaning head to spray chemical solvent to the surface of the wafer and a barrier wall to collect and block used detergent. The said cleaner has high wafer clenaing effect in relatively lower detergent consumption.

Description

technical field [0001] The invention relates to a wafer cleaning device, in particular to a wafer cleaning device capable of improving the wafer cleaning performance without increasing the amount of cleaning agent used. Background technique [0002] In recent years, high-density semiconductor components are in a vigorous development stage, and many semiconductor components belong to the submicron technology range. Therefore, there are often some unique developments in the process to meet the needs of sub-micron. Many different materials are used in the semiconductor manufacturing process. After forming a specific film layer, the required structure is usually produced by etching lithography, etching or planarization processes. Before the semiconductor process is applied, it usually enters the chemical station for cleaning to clean and remove the impurities on the surface. [0003] figure 1 A conventional wafer particle cleaning or removal apparatus 10 is shown. It compris...

AI Technical Summary

Problems solved by technology

However, the traditional cleaning method only relies on pure centrifugal force, so this device cannot effectively remove a large number of particles attached to the wafer, especially some particles are firmly adhered to the surface of the wafer, so the effect of the device is not good

And the traditional method of using centrifugal force, the chemical cleaning agent will be quickly thrown off the surface of the wafer due to the centrifugal force, and the chemical cleaning agent cannot be temporarily stored on the wafer surface, so the chemical cleaning agent is often wasted

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