Washing spray nozzle

Abstract

This invention is to provide a cleaning nozzle with which gaseous fine particles contained in a jetted cleaning liquid are made small sized, have high density and are uniformized. This cleaning nozzle possesses a stirring section having at least a cleaning liquid supply port and a liquid discharge port and a mixing section communicating with the stirring section through the liquid discharge port and having a gas supply port and a cleaning liquid jetting port. In the stirring section, the cleaning liquid supplied from the cleaning liquid supply port is stirred and collides with the inside wall of the stirring section to produce the gaseous fine particles and the liquid containing the gaseous fine particles is discharged from the liquid discharge port. In the mixing section, the liquid supplied from the liquid discharge port and containing the gaseous fine particles is mixed with gas supplied from the gas supply port and jetted from the cleaning liquid jetting port.

Description

technical field [0001] The present invention relates to a cleaning nozzle suitable for cleaning precision parts such as flat panel displays, semiconductor-related parts, and light-related parts. Background technique [0002] In the cleaning of precision parts such as flat panel displays, semiconductor-related parts, and optical-related parts, it is necessary to thoroughly remove fine dust and particles. For example, in flat panel displays, semiconductor-related parts, etc., due to the progress of high integration and high density in recent years, the cleaning of these precision parts will target sub-micron particles. For washing such precision parts, it is also required not to damage the surface of the precision parts having fine patterns or the like. Therefore, the washing liquid is made into fine particles by mixing the washing liquid with gas using a high-pressure washing nozzle, and the object to be washed is washed by spraying the micronized washing liquid on it, or by...

AI Technical Summary

Problems solved by technology

Therefore, a high-pressure pump weighing more than 80 kg is required, which may lead to high cost of cleaning work

[0005] In the above-mentioned washing nozzle, the size of the particles of the sprayed washing liquid is too large, the density of the particles is not enough, and the particles of the sprayed washing liquid are not uniform.

Therefore, when cleaning precision parts that have been highly integrated in recent years, it is impossible to completely remove submicron-sized dust or particles attached to fine patterns, and the desired cleaning effect cannot be obtained.

In order to obtain a sufficient cleaning effect, if the supply pressure of the gas is increased, it may cause damage to the fine pattern (patta-so) of the precision parts.

If the gas supply pressure is increased, the cleaning liquid will be wasted extra, and the cleaning cost will be too high

[0006] In addition to the nozzle, the use of brushes to wash the surface also has the disadvantage that the residue of particles in the brush will damage the surface

However, although low-frequency ultrasonic waves can remove dirt above microns, and high-frequency ones can remove sub-micron dirt, there are disadvantages such as damaging the laundry, causing damage to the ultrasonic oscillator and vibrator, and increasing the cost.

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