Master disk information carrier/magnetic recording medium defect examination method
A technology for information carrier and defect inspection, applied in magnetic recording, disk-shaped recording carrier, carrier indicating/alarming device, etc.
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no. 1 example
[0131] Magnetic switching in the first embodiment of the present invention will be described as follows with reference to FIGS. 1 to 11 .
[0132] Fig. 1 is a sectional view of a magnetic switching device. In FIG. 1, reference number 1 indicates a magnetic recording medium (magnetic disk), and reference number 2 indicates a master disc information carrier. Reference numeral 3 designates the contact surface of the master information carrier 2 which is in contact with the magnetic recording medium 1 . In the contact surface 3 is formed a groove 4 extending from the center of the master information carrier 2 in a radial manner. In this embodiment, the groove depth is set to be around 5 μm. Reference numeral 5 denotes a hub fixed to the master information carrier 2 in the middle thereof, and reference numeral 6 denotes a supporting table for supporting the magnetic recording medium 1 . The support table 6 has a ventilation groove 7 formed therein for flowing air through its cen...
no. 2 example
[0194] A method for detecting defects on a master information carrier according to a second embodiment of the invention will be described below with reference to FIGS. 21 to 25. FIG.
[0195] The second embodiment is different from the first embodiment in that the area on the master information carrier 2 completely includes the magnetic conversion area when it is in close contact with the inspection substrate 100, and the magnetic conversion of the regular magnetic recording medium 1 is performed in the magnetic conversion area. convert.
[0196] FIG. 21 is an illustration for expressing the problem of making the proposed premise of the second embodiment. That is, these figures explain the disadvantages of using the inspection substrate 100 of the same size as the magnetic recording medium 1 . 21A and 21B schematically show the relationship between the master information carrier 2 and the inspection substrate 100 at the suction / compression timing.
[0197] In FIG. 21A, the i...
no. 3 example
[0210] A method of inspecting a defect on a magnetic recording medium according to a third embodiment of the present invention will be described below with reference to FIGS. 26 to 30. FIG.
[0211] Fig. 26 is a flowchart for showing steps according to the present embodiment. In FIG. 26, first, a magnetic layer is formed in step ST21 by a known method of manufacturing a magnetic recording medium. Specifically, the magnetic layer is formed on the aluminum substrate by, for example, dry sputtering such as evaporation or sputtering. And generally, this method is employed as providing a protective film on the magnetic layer to thereby protect it. The protective film is formed by dry sputtering such as evaporation or sputtering, dipping or spin coating.
[0212] Next, steps ST22 and ST25 for inspecting defects on the surface of the magnetic recording medium will be described. Steps ST22 and ST25 are similar to steps ST1 and ST4 shown in FIG. 12 of the first embodiment, respectiv...
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Abstract
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