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Manufacture of laminated piezoelectric ceramic element

A piezoelectric ceramic element and a manufacturing method technology, which are applied in the manufacture/assembly of piezoelectric/electrostrictive devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve the deterioration of piezoelectric properties, etc. question

Inactive Publication Date: 2003-07-30
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, there is a problem in the conventional sintering process used in the above-mentioned piezoelectric ceramic element. If the ceramic green sheets coated with the conductive paste containing Ag as the main component are stacked, the unsintered When the laminated body is sintered, the Ag contained in the internal electrodes enters the ceramic grains in the piezoelectric ceramic layer, deteriorating the piezoelectric characteristics

Method used

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  • Manufacture of laminated piezoelectric ceramic element
  • Manufacture of laminated piezoelectric ceramic element
  • Manufacture of laminated piezoelectric ceramic element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] First, PbO was prepared as the initial raw material 4 ,TiO 2 , ZrO 2 , SnO 2 , Sb 2 o 3 and MnCO 3 .

[0050] Then, in order to obtain Pb((Sn 1 / 3 Sb 2 / 3 ) 0.10 Zr 0.45 Ti 0.45 )O 3 The main component of the composition contains 0.06% Mn( as an additive by weight of the piezoelectric ceramics. The above raw materials are weighed and wet-mixed with a ball mill. The above-mentioned mixture is dehydrated and dried, and the temperature is 820°C for 2 hours. Calcined and crushed to obtain calcined powder.

[0051]Next, additives such as a propylene-based organic binder, an organic solvent, and a plasticizer were added to the calcined powder, and wet-mixed with a ball mill to obtain a slurry. This slurry was shaped by a doctor blade method to produce a ceramic green sheet with a thickness of about 100 μm.

[0052] On this ceramic green sheet, a conductive paste containing Ag / Pd conductor was applied by screen printing, and dried so that the thickness after sinter...

Embodiment 2

[0080] First, Pb was prepared as the initial raw material 3 o 4 、TiO 2 , ZrO 2 and SrCO. Then, in order to get Pb 0.98 Sr 0.02 (Zr 0.45 Ti 0.55 )O 3 The above-mentioned piezoelectric ceramic composition was weighed and wet-mixed with a ball mill.

[0081] The mixture was dehydrated and dried, calcined at 800° C. for 2 hours, and pulverized to obtain a calcined powder.

[0082] Next, additives such as a propylene-based organic binder, an organic solvent, and a plasticizer were added to the calcined powder, and wet-mixed with a ball mill to obtain a slurry.

[0083] Then, the slurry was shaped by a doctor blade method to form a ceramic green sheet having a thickness of about 40 μm.

[0084] On this ceramic green sheet, an Ag / Pd-containing conductive paste was applied by screen printing and dried so that the thickness after sintering became 1.0 to 3.0 μm, thereby obtaining a ceramic green sheet on which an internal electrode layer was formed. Then, the ceramic green sh...

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Abstract

A method for making a monolithic piezoelectric ceramic element having high mechanical strength, excellent piezoelectricity, and high reliability is disclosed. The method includes the steps of applying a conductive paste including a conductor containing Ag as a principal ingredient to ceramic green sheets comprising a piezoelectric ceramic material containing a Pb compound, stacking the ceramic green sheets to form a laminate, and firing the laminate in an atmosphere with an oxygen concentration of about 90% by volume or more during the heating period and with an oxygen concentration of about 5% to 15% by volume during the isothermal period and during the cooling period.

Description

technical field [0001] The present invention relates to a method of manufacturing piezoelectric ceramic elements used in piezoelectric resonators, piezoelectric drivers, piezoelectric filters, piezoelectric buzzers, piezoelectric transformers, and the like. In particular, it relates to a method of manufacturing a multilayer piezoelectric ceramic element in which a conductor mainly composed of Ag is used as an internal electrode. Background technique [0002] Piezoelectric ceramic elements conventionally used in piezoelectric resonators, piezoelectric drivers, piezoelectric filters, piezoelectric buzzers, and piezoelectric transformers, in order to have excellent structural defects and high reliability according to their applications It is well known that the necessary and indispensable point of the components is to sinter under the best conditions. [0003] For example, in the process shown in Japanese Patent Laid-Open No. 2-74566, in the process of heating up before reachi...

Claims

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Application Information

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IPC IPC(8): H01L41/273C04B35/49H01L41/083H01L41/107H01L41/187H01L41/22H01L41/39H01L41/43H04R17/00
CPCH01L41/083H01L41/1876H01L41/39H01L41/273H04R17/00H01L41/107Y10T29/42H10N30/40H10N30/8554H10N30/053C04B35/49H10N30/097
Inventor 加地敏晃今西敏雄
Owner MURATA MFG CO LTD
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