Piezoelectric resonator and its making process

A technology for piezoelectric resonators and manufacturing methods, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., capable of Address issues such as few proposals

Inactive Publication Date: 2003-07-30
MURATA MFG CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] However, for example, in a piezoelectric resonator using the triple wave of the thickness longitudinal vibration mode, a method for suppressing the spurious of the lower-order mode than the fundamental wave etc. has been proposed, but the current situation is to suppress the spurious of the higher-order mode method, but few proposals

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  • Piezoelectric resonator and its making process
  • Piezoelectric resonator and its making process
  • Piezoelectric resonator and its making process

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Embodiment Construction

[0022] In the following, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings, so as to deepen the understanding of the present invention.

[0023] figure 1 It is a schematic perspective view of a thickness longitudinal piezoelectric resonator for explaining one embodiment of the present invention. The piezoelectric resonator 1 has a plate-shaped piezoelectric body 2 . The piezoelectric body 2 is made of appropriate piezoelectric ceramics such as lead titanate zirconate-based ceramics. Polarization is performed in the thickness direction of the piezoelectric body 2 . Furthermore, first and second vibrating electrodes 3 and 4 are formed on both main surfaces of the piezoelectric body 2 . The first and second vibrating electrodes 3 and 4 face each other via the piezoelectric body 2 , and the first and second vibrating electrodes 3 and 4 are formed on a part of the upper surface and the lower surface of the piezo...

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Abstract

The present invention provided a piezoelectric resonator and its manufacturing method and provided a thickness longitudinal piezoelectric resonator of an energy enclosed type. The piezoelectric resonator 1 is manufactured, provided with a piezoelectric crystal 2 and the 1st and the 2nd vibrating electrodes 3, 4 formed on the both main surface of the piezoelectric crystal 2 and utilizes an energy confinement type thickness-longitudinal vibration mode. In a manufacturing method of the piezoelectric resonator the piezoelectric crystal 2 is used and consists of piezoelectric materials of R and A that satisfy a relation Qe=(C / (R*A) for the target frequency when an average pore diameter is R ([mu]m) and porosity is A(%) for the piezoelectric crystal (here, C is a constant depending on a material constituting the piezoelectric crystal). The invention provided a piezoelectric resonator which an achieve an enough value of a vibration mode response to be used without restriction of kinds of piezoelectric materials, sizes of the piezoelectric crystal and target frequency.

Description

technical field [0001] The present invention relates to a piezoelectric resonator used in, for example, a vibrator or a filter, and a method of manufacturing the same. In more detail, it relates to an energy cut-off type piezoelectric resonator utilizing a thickness longitudinal vibration mode and a manufacturing method thereof. Background technique [0002] Conventionally, in order to constitute a vibrator or a piezoelectric filter, various piezoelectric resonators using the fundamental wave or higher-order mode of the thickness longitudinal vibration mode have been proposed. In the piezoelectric resonator, it is required that the value of Qe in the mode to be used be high, while the value of Qe in the parasitic mode on the other hand be low. [0003] However, for example, in a piezoelectric resonator using the triple wave of the thickness longitudinal vibration mode, a method for suppressing the spurious of the lower-order mode than the fundamental wave etc. has been prop...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/22H01L41/09H01L41/187H03H3/02H03H9/17
CPCH03H3/02H01L41/187H10N30/853
Inventor 吉田竜平坂井健一
Owner MURATA MFG CO LTD
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