The invention discloses a phase shifting unit and an MEMS (micro-electromechanical
system) terahertz phase shifter composed of the same, which mainly solve the problems that the existing terahertz phase shifter is overmany in parasitic parameters, strong in process sensitivity, overlarge in driving
voltage and the like. The phase shifting unit comprises a substrate, CPW
signal line ground wires, grooves, CPW
signal lines, an MEMS movable beam and a CPW
signal line, wherein the CPW signal line ground wires are arranged at two opposite sides of the substrate, the grooves are arranged at the opposite ends of the CPW signal line ground wires, the CPW
signal lines are inserted into the CPW signal line ground wires through the grooves and are provided with open circuit terminals, the two ends of the MEMS movable beam are respectively connected with the CPW
signal lines provided with the open circuit terminals, the CPW signal line is arranged on the substrate and is positioned below the MEMS movable beam, one CPW signal line ground wire is provided with a slot communicated with the groove on the CPW signal line ground wire along the length direction of the CPW signal line ground wire, an electrostatic drive offset line is arranged in the slot, one end of the electrostatic drive offset line is connected with the CPW
signal lines provided with the open circuit terminals, the other end of the electrostatic drive offset line is connected with an offset
electrode positive pole bonding pad, and the CPW signal line and the CPW signal lines provided with the open circuit terminals share the CPW signal line ground wires.