Phase shifting unit and MEMS (micro-electromechanical system) terahertz phase shifter composed of same

Abstract

The invention discloses a phase shifting unit and an MEMS (micro-electromechanical system) terahertz phase shifter composed of the same, which mainly solve the problems that the existing terahertz phase shifter is overmany in parasitic parameters, strong in process sensitivity, overlarge in driving voltage and the like. The phase shifting unit comprises a substrate, CPW signal line ground wires, grooves, CPW signal lines, an MEMS movable beam and a CPW signal line, wherein the CPW signal line ground wires are arranged at two opposite sides of the substrate, the grooves are arranged at the opposite ends of the CPW signal line ground wires, the CPW signal lines are inserted into the CPW signal line ground wires through the grooves and are provided with open circuit terminals, the two ends of the MEMS movable beam are respectively connected with the CPW signal lines provided with the open circuit terminals, the CPW signal line is arranged on the substrate and is positioned below the MEMS movable beam, one CPW signal line ground wire is provided with a slot communicated with the groove on the CPW signal line ground wire along the length direction of the CPW signal line ground wire, an electrostatic drive offset line is arranged in the slot, one end of the electrostatic drive offset line is connected with the CPW signal lines provided with the open circuit terminals, the other end of the electrostatic drive offset line is connected with an offset electrode positive pole bonding pad, and the CPW signal line and the CPW signal lines provided with the open circuit terminals share the CPW signal line ground wires.

Description

technical field [0001] The invention belongs to the technical field of components in the field of terahertz communication, radar and micro-electromechanical system (MEMS) technology, and specifically relates to a phase-shifting unit and a MEMS terahertz phase shifter composed of the same. Background technique [0002] Compared with other wave bands such as microwave and laser, the terahertz radar detection system has moderate search ability and coverage, better spatial resolution and angular resolution ability, and has good anti-interference ability. Compared with mechanical scanning radar, phased array radar does not need to rotate its antenna, its wave scanning is more flexible, it can track more targets, it has good anti-interference performance, and it can also find invisible targets. It is an important electronic scanning method. [0003] The phase shifter is a key component of the phased array antenna in the radar, and its cost and performance directly affect the cost...

AI Technical Summary

Problems solved by technology

However, this method cannot meet the capacitance ratio and capacitance value required by the distributed phase shifter in the terahertz frequency band. At the same time, the structure of the MAM capacitor limits the design of the MEMS beam.

In the prior art, the defects of the terahertz phase shifter mainly lie in: too many parasitic parameters, strong process sensitivity; and because the device size is too small, the driving voltage is too large

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