The invention discloses an automatic
coupling method and device for a photoelectric
detector wafer, and the method comprises the steps: employing a
visual recognition technology to achieve the coarse positioning of the
coupling of a to-be-detected
wafer chip, taking an
optical power count value collected in real time as a search
signal, carrying out the real-time analysis of the
signal through combining with a breadth-first
search algorithm, and carrying out the detection of the
signal. Path planning is carried out on a three-dimensional space to determine a search path, precise control of a motion path is carried out on the three-axis precision platform through a
software control system, finally,
optical power value signals under each path position are traversed to find out a maximum value signal, the maximum value signal is moved to the position, and the maximum value signal is the optimal
coupling position. Therefore, automatic coupling of wafers in a limited space is realized. The
wafer coupling device has the beneficial effects that the
automation degree of wafer coupling can be improved, the manual operation cost and the
time cost are reduced, meanwhile, the precision and the stability of wafer coupling are improved, and adverse effects caused by manual operation errors are reduced.