A High Resolution Spectrometer Based on Euler Microring Resonator

A micro-ring resonant cavity and high-resolution technology, applied in the field of on-chip spectrometers, achieves the effects of plug and play, extended working bandwidth, and complete structure

Active Publication Date: 2021-11-19
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For the arrayed waveguide grating type spectrometer on silicon substrate, although the repeatability is good, the integration degree and the stability are high, but the loss and crosstalk between channels must be considered
As for the silicon-based multimode waveguide on-chip spectrometer, it is still in the research stage

Method used

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  • A High Resolution Spectrometer Based on Euler Microring Resonator
  • A High Resolution Spectrometer Based on Euler Microring Resonator
  • A High Resolution Spectrometer Based on Euler Microring Resonator

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specific Embodiment

[0059] The silicon nanowire optical waveguide based on silicon insulator (SOI) material is selected: the core layer is silicon material, the thickness is 220nm, and the refractive index is 3.4744; the lower cladding material is SiO2, the thickness is 2μm, and the refractive index is 1.4404; The cladding material is SiO2, the thickness is 1.5μm, and the refractive index is 1.4404; the metal material of the heating electrode is titanium gold.

[0060] The width of the first single-mode waveguide 2 is 420nm, and the length is 100μm. For the tapered waveguides 3, 20, 12, 28, the width of the narrow waveguide is 420nm, and the width of the wide waveguide is 1600nm, and the length is 30μm. Therefore, the introduction of a wide waveguide can greatly reduce the transmission loss of the waveguide and improve the resolution of the spectrometer. The S-shaped curved waveguides 4, 21, 11, and 29 have a lateral width of 40 μm, a longitudinal length of 0.5 μm, and a width of both input and o...

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Abstract

The invention discloses an on-chip high-resolution spectrometer based on an Euler microring resonant cavity. Contains three input / output ports, Euler ring ultra-precision filter, cascaded ring coarse filter, multi-segment connecting waveguide, and detector array. The filtering process is mainly divided into ultra-precision filtering and coarse filtering. For ultra-precision filtering, based on multi-mode silicon optical wide waveguide, we designed an Euler microring resonator with ultra-high quality factor, including two-section wide waveguide and modified Euler The curved wide waveguide of the pull curve, and the input / output coupling area and the output / input coupling area of ​​the Euler ring ultra-precision filter can effectively suppress the excitation of high-order modes. For coarse filtering, a racetrack-type cascaded microring structure is used to construct a higher flat-top filter. The present invention adopts ultra-precise filtering combined with coarse filtering, only needs one scan to obtain complete data, simplifies and improves reliability at the same time, can be plugged and played, and has the advantages of small size, compact structure and high resolution.

Description

technical field [0001] The invention relates to a high-resolution spectrometer based on an Euler microring resonant cavity, more specifically to a Euler microring and a multi-channel raceway type including two wide waveguides and a curved wide waveguide designed according to a modified Euler curve On-chip spectrometer combined with cascaded rings. Background technique [0002] Spectral analysis is a technique for measuring the intensity of light in the ultraviolet, visible, near-infrared, and infrared bands. Spectral measurement analysis has a wide range of applications, such as laboratory chemical analysis, clinical medical testing, industrial monitoring, aerospace remote sensing, etc., and has huge market application value. Compared with traditional spectrometers, miniature spectrometers have the advantages of small size, light weight, fast detection speed, easy integration, and convenient use, and have become a new research trend. When the spectrometer is integrated int...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28G01J3/02
Inventor 戴道锌陈汤楠张龙
Owner ZHEJIANG UNIV
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