Accelerated speed sensor
An acceleration sensor, acceleration technology, applied in the measurement of acceleration, speed/acceleration/impact measurement, acceleration measurement using inertial force, etc., can solve the problems of inability to make the thickness thin, the insulation resistance drops, the polarization drop, etc., to improve the voltage Sensitivity, reduction in manufacturing cost, effect of reduction in the number of electrodes
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[0041] Figure 1 to Figure 5 A first embodiment of the acceleration sensor of the present invention is shown.
[0042]In this acceleration sensor 1A, both ends in the longitudinal direction of the piezoelectric element 2 are supported from both ends by a pair of support frames (support members) 10 and 11 having a U-shaped cross section. The support frames 10 and 11 are formed using the piezoelectric element 2 and insulating ceramics having approximately the same thermal expansion coefficient, or the like. Recesses 10a, 11a are formed on the inner surfaces of the support frames 10, 11 so that the piezoelectric element 2 can obtain a bending space under the action of the acceleration G.
[0043] In the piezoelectric element 2 of this embodiment, three layers of piezoelectric bodies 2a, 2b, and 2c made of piezoelectric ceramics having a thin rectangular shape and a thin wall are laminated and sintered into one body. The thicknesses of the three layers may be the same, and the o...
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