Method for utilizing frequency domain method to make defference measurement of accurate reconfiguration

A differential measurement and accurate technology, applied in the field of detection applications, can solve the problems of reconstruction accuracy influence, failure to calculate the relationship between sensor zeroing errors, errors, etc., and achieve the effect of improving detection efficiency

Inactive Publication Date: 2004-02-25
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

Thus injecting new vitality into the transverse shear wavefront interference method, this method can reconstruct various surfaces (including periodic, non-periodic, smooth and non-smooth surfaces, etc.) without any "prior" knowledge, On this basis, an ESAD (Extended Shear Angle Difference) surface topography detection device has also been developed, but this method still has some shortcomings, such as it only works when the size of the workpiece is equal to the multiple of the shear amoun...

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  • Method for utilizing frequency domain method to make defference measurement of accurate reconfiguration
  • Method for utilizing frequency domain method to make defference measurement of accurate reconfiguration
  • Method for utilizing frequency domain method to make defference measurement of accurate reconfiguration

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Embodiment Construction

[0021] The invention is realized by carrying out accurate reconstruction in the frequency domain according to the difference values ​​measured by two different distances (or shear amounts) on the measured object. It first adopts the "natural continuation" method to carry out accurate periodic continuation of the two sets of difference values, and then obtains two initial evaluation curves through Fourier forward and reverse transformation, but these two initial evaluation curves lack the distance between the respective sensors (or Shearing amount) is the harmonic component of the cycle, and due to the influence of the zeroing error, they have different offsets respectively, and then the ratio of the zeroing error to the corresponding sensor spacing (or shearing amount) is calculated through theoretical analysis Therefore, on the basis of eliminating the influence of zeroing errors, the harmonic components lacking in one set of evaluation curves are supplemented by the correspon...

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Abstract

The method for making accurate restructure of difference measurement by using frequency domain method is characterized by that according to the difference value obtained by measuring two different separation distances or shearing quantities of measured object, making two groups of difference values undergo the process of cycle continuation and utilizing Fourier obverse and inverse transformation to obtain two initial evaluation curves, then calculating the difference value of ratio of zero modulation error and correspondent sensor separation distance or shearing quantity and combining two initial evaluation curves and eliminating the influence of zero modulation error to obtain the evaluation curve of measured parameter, then removing the linearity tendency in the evaluation curve to obtain one accurate evaluation curve having no theoretical error so as to implement the accurate restructure of measured parameter.

Description

Technical field: [0001] The invention relates to the technical field of detection applications, in particular to a detection method for reconstructing the original measured parameters according to the differential measurement values ​​of the measured parameters, including the straightness, flatness, cylindricity, and free-form surface of precision and ultra-precision workpiece surfaces. Surface shape detection and wavefront reconstruction for transverse shear interference. Background technique: [0002] In ultra-precision machining, in order to detect the straightness, cylindricity, flatness and surface accuracy of the surface of the workpiece, the multi-probe scanning method is often used. This method uses the displacement probe (commonly used non-contact sensors such as eddy current or Capacitance, etc.) or angle detectors (such as autocollimators, etc.) are installed on the slide plate and move linearly along the measured contour of the workpiece, or the sensor is fixed, ...

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Application Information

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IPC IPC(8): G01B7/28G01B11/26
Inventor 李圣怡尹自强戴一帆王宪平郑子文
Owner NAT UNIV OF DEFENSE TECH
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