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Retarding resistant driving method for piezoelectric ceramic driver

A technology of piezoelectric ceramics and driving methods, applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc.

Inactive Publication Date: 2005-01-19
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these methods require complex mathematical models to control

Method used

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  • Retarding resistant driving method for piezoelectric ceramic driver
  • Retarding resistant driving method for piezoelectric ceramic driver

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Experimental program
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Embodiment Construction

[0008] In this embodiment, the hard tungsten bronze piezoelectric ceramic driver is selected. Compared with the soft perovskite piezoelectric ceramic driver, the hysteresis characteristic and creep error of this driver are greatly improved, especially in terms of performance. In the specific implementation, the voltage driving method is set as follows: set the target voltage value V 1 , V 2 , V 3 ......The step-by-step driving voltage of Vn changes step by step, and reaches the target voltage value after high-frequency reciprocating vibration near each target voltage value.

[0009] Take the voltage range of 0-100 volts as an example. Each voltage change interval is 10 volts. V 1 = 10 volts is the target voltage value, V 2 =20, V 3 =30 is the subsequent target voltage values. When applying the voltage sequence, use the following applied voltage sequence 0~15~5~15~5~15~10~25~15~25~15~25~20, and so on until reaching the target voltage peak of 100 volts; The above is the ...

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Abstract

The invention is an anti-lag driving method of piezoelectric ceramic driver, and its characteristic lies in that: it selects a hard W-bronze piezoelectric ceramic driver and sets its voltage driving mode: setting a set driving voltage gradually changing at object voltage values V1,V2, V3, ..., Vn, and near each object voltage value, making a high-frequency to-and-fro vibration and then reaching the object voltage value. It can largely improve the lag characteristic and nonlinear error of the driver and also make the property of the driver more stable.

Description

Technical field: [0001] The invention relates to a method for improving the hysteresis characteristics of a tungsten bronze series piezoelectric ceramic driver used as a driving element of a micro-motion worktable in realizing nanoscale positioning. Background technique: [0002] With the development of nano-measurement technology, people pay more and more attention to the research on multi-degree-of-freedom micro-motion table that can realize nano-level positioning. The selection and use of the driving components of the micro-motion table directly affect the final performance index. At present, there are many kinds of micro-displacement driving components used in practice, and the piezoelectric ceramic driver is characterized by its small size, light weight, low driving voltage, high precision and displacement resolution, fast frequency response, no heat generation, and no noise. It has become one of the most widely used driving components in the field of micro-positioning...

Claims

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Application Information

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IPC IPC(8): H02N2/14
Inventor 余晓芬俞建卫王永红黄其圣邓辉魏玉凤
Owner HEFEI UNIV OF TECH