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Light source device and light monitor used thereof

A light source device and monitor technology, which is applied to the components of lighting devices, light sources, measuring devices, etc., can solve the problems of inability to maintain illumination and detection, and achieve the effect of increasing the amount of light and improving detection accuracy

Inactive Publication Date: 2005-02-09
IWASAKI ELECTRIC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] When the light from the light emitting end 33out of the mixing rod 33 is led out and its light quantity is detected, the light quantity of the irradiated light changes due to the deviation of the luminous point from the first focal point, even if the luminous quantity of the lamp 31 itself does not change. It cannot be inspected at all times, and as a result, a fatal flaw occurs that cannot maintain a certain amount of light on the object to be inspected.

Method used

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  • Light source device and light monitor used thereof
  • Light source device and light monitor used thereof
  • Light source device and light monitor used thereof

Examples

Experimental program
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Effect test

Embodiment Construction

[0054] In this embodiment, the extremely simple structure realizes that whether it is the change of the irradiated light amount caused by the change of the luminous amount of the lamp itself or the change of the irradiated light amount caused by the change of the light amount distribution diagram, it can be accurately performed. A plan to detect and maintain the amount of irradiated light stably.

[0055] Fig. 1 is a schematic diagram showing a light source device according to the present invention, figure 2 is a schematic diagram showing a dimming filter, Figure 3-Figure 8 is a schematic diagram showing a light quantity monitor, Figure 9A graph showing the relationship between the light loss due to the roughening process and the amount of detected light and the amount of irradiated light, Figure 10 A graph showing the relationship between the amount of irradiated light and the amount of detected light is shown.

[0056] The light source device 1 shown in FIG. 1 is used...

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Abstract

To maintain an irradiative light quantity as a constant by detecting irradiative light quantity variations correctly, even if whether they happen due to the light quantity of a lamp or the variations of distribution pattern of light quantity. When light of the lamp (4) is emitted from a light exit port (6) by focusing light with a reflecting mirror (5) to irradiate toward irradiated objects directly or indirectly, in a light quantity monitor (M) detecting irradiative light quantity irradiating toward irradiated objects and a light source apparatus (1) equipped with a light quantity controller (7) controlling in feedback manner the irradiative light quantity depending on the detected light quantity, the light quantity monitor (M) consists of a light guide rod (8) as an optical path for leading light focused with the reflecting mirror (5) toward the light exit port (6); and of an optical sensor (9) detecting the leaked light quantity from the peripheral surface (8a) of the light guide rod (8) as the irradiative light quantity.

Description

technical field [0001] The present invention relates to a light source device having a light quantity controller, and is particularly suitable for a light source suitable for inspection devices such as image processing inspection devices using a CCD camera or the like, which must maintain a constant light quantity to irradiate inspection objects. Background technique [0002] For example, in the manufacturing process of a display panel, as a prior art, light is irradiated to a glass plate and a paint-coated surface of an object to be inspected, and they are observed with a CCD camera to detect such things as scratches and paint. An image processing inspection device for defects such as defects in the assembly process. [0003] At this time, the conditions required for the light source device include, for example, that the amount of light irradiated to the object to be inspected (the object to be irradiated) does not change at least within the inspection time, and that it is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/84F21V7/08F21V8/00F21V9/40F21Y101/00G01J1/00H01J9/42
CPCF21V9/45F21Y2101/00G01M11/02G01N21/84G01N21/8806G01N2021/8835H01J9/42
Inventor 北藤明博大塚宏树小久保哲夫小川大辅酒井雅宽
Owner IWASAKI ELECTRIC CO LTD