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Aluminum-alloy reflective film for optical information recording and target material and recording medium for its formation

一种记录介质、铝合金的技术,应用在光学记录载体、用光学方法记录/重现、磁性记录等方向,能够解决导热率低、耐腐蚀性低、导热率高等问题,达到低导热率、低熔化温度、高耐腐蚀性的效果

Inactive Publication Date: 2005-05-04
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, in order to perform laser marking with a lower output, the thermal conductivity of the reflective film should be as low as possible, but in 6061-series aluminum alloys, the thermal conductivity is too high
Therefore, when the current 6061-series aluminum alloy is used for laser marking, the laser output is too large, so there is a problem that the polycarbonate substrate or the adhesive layer constituting the disk will be thermally damaged.
[0008] [2] Low corrosion resistance
[0014] However, the 6061-series aluminum alloy used as a reflective film on optical disks dedicated to reproduction has high thermal conductivity and low corrosion resistance as described above, and it is difficult to support laser marking applications based on this point.
In addition, in the field of reflective films for magneto-optical recording, among the aluminum alloys proposed so far (described in Patent Documents 1 to 3), it is difficult to support laser marking applications as described above.

Method used

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  • Aluminum-alloy reflective film for optical information recording and target material and recording medium for its formation

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0057] Al-Nd (aluminum alloy containing Nd) film and Al-Y (aluminum alloy containing Y) film were made, and the addition amount (content) of Nd and Y and the melting temperature, thermal conductivity, reflectivity and BCA of the film were studied. Burst Cutting Area) characteristics.

[0058] The above-mentioned film was produced as follows. That is, an Al-Nd thin film or an Al-Y thin film was formed (formed into a film) on a glass substrate (Corning #1737, substrate size: diameter 50 mm, thickness 1 mm) by DC magnetron sputtering. At this time, the film forming conditions are: substrate temperature: 22°C, argon pressure: 2mTorr, film forming speed: 2nm / sec, back pressure: -6 Torr. As the sputtering target, an aluminum alloy sputtering target having the same composition as that of the aluminum alloy thin film to be obtained was used.

[0059] The melting temperature of the film was measured as follows. An aluminum alloy thin film (Al-Nd thin film, Al-Y thin film) formed int...

example 2

[0068] Manufactured Al-4.0Nd-(Ta, Cr, Ti) thin film (thin film composed of aluminum alloy containing 4.0at% Nd and at least one of Ta, Cr, Ti) and studied the addition of Ta, Cr, Ti The relationship between the amount and the melting temperature, thermal conductivity, reflectivity, corrosion resistance and BCA characteristics of the film.

[0069] The above-mentioned film was produced as follows. That is, an Al-4.0Nd-(Ta, Cr, Ti) alloy thin film was fabricated (formed into a film) on a glass substrate (Corning #1737, substrate size: 50 mm in diameter, 1 mm in thickness) by DC magnetron sputtering. At this time, the film forming conditions are: substrate temperature: 22°C, argon pressure: 2mTorr, film forming speed: 2nm / sec, back pressure: -6 Torr. As the sputtering target, an aluminum alloy sputtering target having the same composition as that of the aluminum alloy thin film to be obtained was used.

[0070] The melting temperature of the film was measured as follows. An al...

example 3

[0078] Make Al-4.0Nd-[Mo, V, W, Zr, Hf, Nb, Ni (hereinafter, all referred to as Mo~Nb, Ni)], thin film (containing 4.0at% Nd while containing Mo~Nb, Ni Films composed of more than one aluminum alloy), the relationship between the addition amount of Mo-Nb and Ni and the melting temperature, thermal conductivity, reflectivity, corrosion resistance and BCA characteristics of the film was studied.

[0079] The above-mentioned film was produced as follows. That is, an Al-4.0Nd-(Mo-Nb, Ni) alloy thin film was fabricated (formed into a film) on a glass substrate (Corning #1737, substrate size: diameter 50 mm, thickness 1 mm) by DC magnetron sputtering. At this time, the film forming conditions are: substrate temperature: 22°C, argon pressure: 2mTorr, film forming speed: 2nm / sec, back pressure: -6 Torr. As the sputtering target, an aluminum alloy sputtering target having the same composition as that of the aluminum alloy thin film to be obtained was used.

[0080] The melting temper...

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Abstract

The invention includes (1) an aluminum-alloy reflection film for optical information-recording, containing an element Al as the main constituent, 1.0 to 10.0 at. % of at least one element selected from the group of rare earth elements, and 0.5 to 5.0 at. % of at least one element selected from the group consisting of elements Cr, Ta, Ti, Mo, V, W, Zr, Hf, Nb, and Ni, (2) an optical information-recording medium comprising any of the aluminum-alloy reflection films described as above, and (3) a sputtering target having the same composition as that for any of the aluminum-alloy reflection films described as above. There are provided an aluminum-alloy reflection film for optical information-recording, having low thermal conductivity, low melting temperature, and high corrosion resistance, capable of coping with laser marking, an optical information-recording medium comprising the reflection film described, and an aluminum-alloy sputtering target for formation of the reflection film described.

Description

technical field [0001] The invention relates to an aluminum alloy sputtering target material for forming an aluminum alloy reflective film for optical information recording, an optical information recording medium, and an aluminum alloy reflective film for optical information recording, in particular to CD, DVD, Blu-ray Disk, In the optical information recording media such as HD-DVD, especially in the reproduction-only media (ROM), in order to be able to perform labeling with lasers or the like after the disc is formed, it has low thermal conductivity, low melting temperature, and high corrosion resistance. A reflective film having high reflectivity, a sputtering target for forming the reflective film, and an optical information recording medium having the reflective film. Background technique [0002] There are several types of optical discs, but they are mainly divided into three types: playback-only, write-once, and rewritable in terms of recording and reproduction princi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/14C23C14/34G11B7/258
CPCG11B7/258C23C14/3414C23C14/14G11B7/2585
Inventor 中井淳一田内裕基高木胜寿
Owner KOBE STEEL LTD
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