Focus detection and tilt regulating method and apparatus using the same
A technology of focus detection and distribution detection, which is applied to measurement devices, recording/reproducing by optical methods, photometry, etc., can solve the problems of methods such as the method of not revealing the image of the imaging element, and achieve the effect of reducing costs.
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[0057] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0058] figure 1 is a diagram showing the basic configuration of the focus detection device according to the present invention. Such as figure 1 As shown, what is detected by this focus detection device A is an image on a reference plane (in the figure, for example, a beam spot is represented by a circle). The image can move within a certain, for example, rectangular area. In order to detect the focus of the movable image, the focus detection device A of the present invention includes a detection surface 3 for receiving an image on a reference plane through a projection optical system 2 , a one-dimensional light energy distribution detection unit 4 and a focus state determination unit 5 . Specifically, the detection surface 3 has, for example, a rectangular area corresponding to a certain area of the reference plane 1, and can receive ...
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