Dynamic testing loading unit for MEMS disc or device

Abstract

The invention discloses a dynamic testing loading unit for MEMS disc or device, the structure of which is: the filter is arranged on the open head face of cavity body and forms a seal cavity with the cavity body; on the cavity body arranged a electrode, having charging port, vacuumizing port and vacuometer interface; the bracket is fixed on the cavity body's base; the adjusting screw is arranged in the cavity body's base; piezoceramics is arranged in the bracket, the lower end of which is connected with the adjusting screw, the upper end of which is connected with the bracket; the bearing plate is fixed on the bracket and the disc treadle bar is connected with bearing plate. The device can get accurate vibration frequency and amplitude through piezoceramics and realize frenquency and amplitude's change in a comparatively wide range; it's easy to control and can provide different vacuum degree, different temperature and different vibration state conditions when testing MEMS disc or device.

Description

technical field [0001] The invention relates to a loading device, in particular to a loading device applied to the dynamic testing of MEMS (Micro-electromechanical systems, micro-electromechanical systems) wafers or devices. Background technique [0002] The loading device for the dynamic test of the specimen, that is, the vibrator is a device that converts electrical energy into mechanical energy and provides vibration to the specimen. In recent years, a large number of MEMS devices have appeared and been applied. In order to obtain the modal parameters, it is necessary to load them with excitation and measure their responses. Traditional vibration exciters have been widely used in vibration loading tests of aircraft, missiles, ships, machine tools, bridges, etc., and have also been applied to local components that need to provide vibration and other forms of loading for testing. The disadvantages of traditional loading devices are: ①The application of these loading device...

AI Technical Summary

Problems solved by technology

The disadvantages of traditional loading devices are: ①The application of these loading devices generally requires the sensor to be installed on the specimen, so the specimen needs to have a large enough size, and it is also necessary to ensure that the installation of the sensor is not enough to affect the dynamic test of the specimen The accuracy of the vibration and measurement system provided by these loading devices is not suitable for dynamic testing of tiny specimens, so it is not suitable for small specimens such as MEMS wafers or devices.

②The traditional vibration loading test is carried out in the atmospheric environment or even the harsh working environment, which is not suitable for the dynamic test of the test pieces with strict environmental requirements such as MEMS wafers or devices

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