Steel cylinder hand cart

Abstract

The present invention provides a cylinder carriage, it has the gas-tight funtion and can be used for transferring cylinder in which the dangerous gas is held, when the cylinder gas is leaked, its gas-tight space can make the gas can not be diffused into air and do not produce harm to human body. Said cylinder carriage mainly comprises a carriage main body whose interior has a containing space with double-layer structure. On the carriage main body is set a gas monitoring system including gas detector, pressure gauge and sensor, etc.

Description

[0001] technical field [0002] The invention relates to a design of a trolley, in particular to a steel cylinder trolley used for transporting and temporarily storing dangerous gases. Background technique [0003] In the semiconductor process, whether it is a vapor deposition process, an etching process or an ion implantation process, various gases are required to allow the reaction to proceed. These gases are usually stored in various steel cylinders, and the cylinders are placed in specific storage The location is preserved, and the steel cylinders containing the gas are transported to the silicon wafer factory for use in different processes when used. However, because these gases are usually highly toxic (such as PH3, EF3 and ASH3) or explosive (such as SiH4, H2 ), so it must be handled very carefully. Wafer factories usually store these gases in specific gas storage cabinets, and cooperate with pressure regulators, gas detectors, gas removal devices, etc. to prevent gas ...

AI Technical Summary

Problems solved by technology

[0003] In the semiconductor process, whether it is a vapor deposition process, an etching process or an ion implantation process, various gases are required to allow the reaction to proceed. These gases are usually stored in various steel cylinders, and the cylinders are placed in specific storage The location is preserved, and the steel cylinders containing the gas are transported to the silicon wafer factory for use in different processes when used. However, because these gases are usually highly toxic (such as PH3, EF3 and ASH3) or explosive (such as SiH4, H2 ), so it must be handled very carefully. Wafer factories usually store these gases in specific gas storage cabinets, and cooperate with pressure regulators, gas detectors, gas removal devices, etc. to prevent gas leakage. However, when the gas storage cabinet When the gas in the cylinder is used up, the gas must be transported to the gas storage cabinet in the form of steel cylinders for replenishment. Usually, the steel cylinders are moved manually, but this is very easy to cause disasters due to human negligence and gas leakage in the cylinders, and every time The quantity shipped is limited and the shipping efficiency is low

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