High-diffraction efficiency quartz transmission grating of 1053 nano wavelength

A diffraction efficiency, transmission grating technology, applied in the field of gratings

Inactive Publication Date: 2005-11-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
View PDF0 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But as far as we know, no one has given the design parameters of high-density

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength
  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength
  • High-diffraction efficiency quartz transmission grating of 1053 nano wavelength

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0017] See first figure 1 , figure 2 with image 3 The high diffraction efficiency quartz transmission grating with a wavelength of 1053 nm of the present invention is a high-density rectangular grating, characterized in that the linear density of the grating is 895-965 lines / mm, the depth of the grating is 1.9-2.1 microns, and the duty cycle of the grating Is 1 / 2.

[0018] The linear density of the grating is 920 lines / mm, and the depth of the grating is 2 microns.

[0019] The grating of the present invention is a high-density rectangular grating manufactured by using micro-optics technology. image 3 The holographic recording method of the shown device records grating: a He-Cd laser (wavelength is 0.441μm) is used to emit two plane waves at an angle of 2θ to form an interference field on the substrate. We use a glass sheet coated with MICROPOSIT series 1818 photoresist as the recording substrate. ∧ represents the space period of the grating, that is, the distance between adjace...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Depthaaaaaaaaaa
Depthaaaaaaaaaa
Login to view more

Abstract

A quartz transmission grating of high efficiency of diffraction is a high density, rectangle quartz grating of deep eclipse. The grating's wave-length is 1053 nms and its line density 895-965 lines/ millimeter. Its depth is 1.9-2.1 micron while the ratio of the filled space to empty space by the grating is 1/2.The invention can make the efficiency of +1 class Prague transmission and diffraction in the partial vibration directions of TE and TM be more than 85% at the same time. It realizes free choice of partial vibration model. Especially when the grating density is 920 lines/ millimeter and the grating depth is 2 micron, each efficiency of TE and TM partial vibration is more than 94%. The invention is produced by the micro-electronics light chiseling craft and the deep eclipse craft. Its cost is low and it is suitable for volume-produce.

Description

technical field [0001] This patent relates to a grating, especially a high-diffraction-efficiency transmission grating with a wavelength of 1053 nanometers, a high-density rectangular deep-etched quartz grating. Background technique [0002] Holographic gratings and blazed gratings are two types of traditional gratings: holographic gratings are formed by recording the interference fringes of two beams of light on a photosensitive film layer; blazed gratings are formed by mechanical scribing. These two gratings are surface gratings, which do not have the Bragg effect of volume gratings, so the diffraction efficiency is low. After the metal reflective film is coated on the surface, the efficiency will be improved to a certain extent, but the reflectivity of the metal film layer is fixed and limited. , so it is impossible to increase infinitely. [0003] Rectangular deep etched grating is a grating with deep groove shape processed on the substrate by microelectronic deep etchi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B5/18
Inventor 周常河张妍妍
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap