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Evaporate source module and vapor deposited apparatus using thereof

A technology of evaporation source and components, which is applied in the field of evaporation source components and evaporation devices, and can solve problems such as difficult to control area adjustment plates

Active Publication Date: 2010-05-05
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] refer to figure 1 , the area adjusting plate 2 is arranged between the above-mentioned evaporation sources, and by controlling the size of the opening 0 of the housing 3 that accommodates the above-mentioned evaporation sources, the discharge direction of the vapor deposition substances discharged from the evaporation sources can be limited, so that the evaporated A uniform thin film is formed on the plated substrate (S). However, in the above-mentioned patent documents, it is not easy to control the size of the area regulating plate 2 and the opening 0 used to limit the direction of the evaporated material discharged from the evaporation source.

Method used

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  • Evaporate source module and vapor deposited apparatus using thereof
  • Evaporate source module and vapor deposited apparatus using thereof
  • Evaporate source module and vapor deposited apparatus using thereof

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Embodiment Construction

[0029] The evaporation source assembly and the evaporation device using the assembly of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below are examples that fully convey the idea of ​​the present invention to those skilled in the art. However, the present invention is not limited to the embodiments described below, and can also be implemented in other forms. Also, for convenience, the size and thickness of the device are exaggerated in the drawings. The same reference numerals are used throughout the specification to refer to the same components.

[0030] figure 2 It is a figure for demonstrating the vapor deposition apparatus which concerns on embodiment of this invention.

[0031] See attached figure 2 , the evaporation device 10 of the embodiment of the present invention has: the chamber 20 constituting the mouth of the above-mentioned evaporation device 10; The evaporation source of th...

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Abstract

One evaporator source assembly and the evaporation coating apparatus therewith are disclosed. The evaporator source assembly has one shell with one shield part, which has a guide part with extending lines toward the same position, and evaporating sources with nozzle part, which has inclined through holes. Therefore, the evaporated and coated materials from all the evaporating sources are coated tothe same area of the coated base plate so as to form film with homogeneous roughness and homogeneous thickness.

Description

technical field [0001] The present invention relates to an evaporation source assembly and an evaporation apparatus, more particularly, the present invention relates to an evaporation source assembly and an evaporation apparatus having the same which can form a uniform thin film. Background technique [0002] In recent years, as society has entered the age of high information technology, consumers who want to obtain fast and accurate information have become increasingly demanding. Therefore, the research and development of display devices that are thin, portable, and fast in information processing are accelerating. . Among them, the organic electroluminescent device is a self-luminous type that emits light by recombining electrons and holes in the organic light-emitting layer by applying a voltage to an organic film including an organic light-emitting layer. This eliminates the need for a backlight type such as an LCD, enables reduction in weight and thickness, and simplifi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCH01L21/02118H01L21/02269H01L21/67098H01L2924/12044H10K71/10H10K71/00
Inventor 安宰弘李星昊赵源锡
Owner SAMSUNG DISPLAY CO LTD