Extracellular potential measuring device and method for fabricating the same
A manufacturing method, cell technology, applied in the direction of measuring devices, electrochemical variables of materials, biochemical cleaning devices, etc.
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Embodiment approach 1
[0059] figure 1 is a perspective view of the extracellular potential measuring device according to Embodiment 1 of the present invention, figure 2 is its cross-sectional view, image 3 is an enlarged view of its cross-section.
[0060] This extracellular potential measuring device includes a substrate 1 made of silicon on which grooves 2 are provided. A plurality of cell trapping holes 101 are provided on the bottom surface 3 of the groove 2, and each trapping hole 101 is constituted by a first opening 4, a cavity 6, and a second opening 5 sequentially connected on a straight line. The diameter of the first opening 4 is smaller than the maximum diameter of the cavity 6 and larger than the diameter of the second opening 5 .
[0061] These specific dimensions are optimally determined according to the size of the subject cells. For example, in a subject cell with a diameter of 25 microns, the diameter of the first opening 4 is 20 microns, which is smaller than 25 microns, and ...
Embodiment approach 2
[0094] 23 is a perspective view of an extracellular potential measurement device according to Embodiment 2 of the present invention, Figure 24 is its cross-sectional view, Figure 25 is its enlarged cross-sectional view. Unlike Embodiment 1, substrate 16 is a laminate of first silicon layer 17 , silicon dioxide layer 18 , and second silicon layer 19 . The first opening 21 is formed on the silicon layer 17 , the second opening 22 is formed on the second silicon layer 19 , and the cavity 23 is formed on the silicon dioxide layer 18 .
[0095] The detection electrode 24 is formed only on the inner wall of the second opening 22 and below the cavity 23 , and the extraction electrode 25 is formed on the bottom of the substrate 16 . The detection electrode 24 and the extraction electrode 25 are electrically connected near the second opening 22 .
[0096] Since the operation of this extracellular potential measuring device is the same as that of the measuring device in Embodiment ...
Embodiment approach 3
[0106] Figure 30 is a perspective view of an extracellular potential measuring device according to Embodiment 3 of the present invention, Figure 31A , Figure 31B as well as Figure 32 is its cross-sectional view. also, Figure 33 ~ Figure 34 is an enlarged cross-sectional view of the measurement setup. Figure 35 ~ Figure 42 is a cross-sectional view for explaining the manufacturing method of the measuring device.
[0107] exist Figure 30 ~ Figure 32 The substrate 28 is composed of a laminated structure of a base 29 made of silicon, an intermediate layer 30 made of silicon dioxide, and a thin plate 31 made of silicon. A sample containing subject cells is stored on the substrate 29, a groove 32 for mixing the subject cells 37, the culture solution 38, and a drug is provided, and a through hole is provided on the thin plate 31 forming the bottom of the groove 32. 33. A recess 34 is provided on the side of the groove 32 of the through hole 33 , and the diameter of the...
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Abstract
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