Surface detection device and surface detection method using same
A technology for surface detection and detection of objects, which is applied in the direction of measuring devices, optical testing flaws/defects, instruments, etc., and can solve problems such as complex structures, narrow scanning areas, and inability to detect impurities
Active Publication Date: 2010-05-12
K C TECH
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Problems solved by technology
[0021] However, the existing coating apparatus as described above cannot detect impurities located outside the scanning area because the scanning area of the laser beam 60 generated from the surface inspection device 54 is very narrow, and thus cannot fully inspect the support table 50 or the upper glass. Impurities on the substrate 22 and the lower glass substrate 32
[0022] To solve the problem described above, multiple surface detection devices 54 need to be provided for scanning the entire surface of the supporting platform 50 or the upper glass substrate 22 and the lower glass substrate 32, but multiple surface detection devices 54 will not only increase the production cost , but also make the structure very complex
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[0048] Hereinafter, embodiments of the surface inspection device provided by the present invention will be described in detail with reference to the accompanying drawings.
[0049] image 3 It is a schematic diagram of the surface detection device provided according to the first embodiment of the present invention, Figure 4 It is a front view of the surface detection device provided according to the first embodiment of the present invention, Figure 5 for along Figure 4 A partial cross-sectional view of the surface inspection device provided by the first embodiment of the present invention taken along the line A-A.
[0050] image 3 and Figure 4 The surface detection device 100 provided by the first embodiment of the present invention shown in the figure is located in front of the moving direction of the slit nozzle 400, which is used to coat the photoresist layer on the substrate 300 mounted on the support table 200. 410. This surface inspection device 100 includes: ...
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The invention provides a surface detection device and a surface detection method using the same. The surface detection device comprises: a transfer arm arranged isolating to a detecting surface of a detecting object; an optical sensor having a luminescent part and an absorbing part which are combined to the two ends of the transfer arm respectively, and the optical sensor having application in receiving and sending light in a direction parallel to the detecting surface at a position above the detecting surface at a certain distance; a driving unit for deportation of the transfer arm at a direction parallel to the detecting surface but not the same direction as the luminescent direction of the optical sensor; and a position regulator for regulating distance between the detecting surface ofthe detecting object and luminescent route of the optical sensor. Thus, the impurities in top or bottom surface of the substrate can be detected correctly and the device has a low production cost dueto a simple structure.
Description
technical field [0001] The invention relates to an impurity detection device and detection method, in particular to a detection device and method for detecting impurities located on the upper surface or bottom surface of a substrate in order to stably coat photoresist on the substrate. Background technique [0002] In the current information society, the importance of display devices as a transmission medium of visual information has attracted people's attention more than ever. The current mainstream cathode ray tube (Cathode Ray Tube, also known as Brown tube) has relatively large problems in terms of weight and volume. Therefore, many kinds of flat panel display devices (Flat Panel Displays) that can overcome this limitation of cathode ray tubes are being continuously developed. [0003] Flat panel display devices include liquid crystal display panels (LCD: Liquid Crystal Display), field emission displays (Field Emission Display), plasma display panels (Plasma Display Pan...
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IPC IPC(8): G01N21/892G01N21/95
CPCG02F1/1309G02F2201/58G02F2203/69H01L21/677
Inventor 赵康一卢智晟权晟
Owner K C TECH