Base plate output-input device and base plate output-input method

Abstract

A substrate carrying in / out device (100) and a substrate carrying in / out method for taking out a substrate from a tray or storing the substrate in the tray, the method comprising the steps of positioning a pallet (101) at a specified position on a conveyor (103), holding and lifting the untreated trays located on the upper stage of the treated tray among the multiple stages of trays (102) placed on the pallet by a tray chuck (107), and allowing lift pins (105) to pass lift pin pass holes (102a) formed in the pallet and the tray while the untreated trays are raised and a sufficient space is secured above the treated tray so that the operation of the lift pins can be controlled such that the tips of the lift pins can be separated a specified distance from the treated tray. Thus the substrate (108) can be carried in and out.

Description

Technical field [0001] The present invention relates to a substrate import and export device, and in particular to a substrate import and export device for taking out a substrate from a tray stacked on a pallet, and then loading the processed substrate on the tray again. Background technique [0002] In the past, various substrate conveying devices have been proposed and realized. They are equipped with a pallet shelf that supports multiple pallets so that they can be accessed. The workpieces stacked on one pallet output from the pallet shelf are taken out and supplied to Sheet processing machine, and take out the processed workpiece from the sheet processing machine and stack it on other pallets. [0003] For example, there is an existing substrate transfer apparatus described in JP 12-246552 A. FIG. 1 is an explanatory diagram schematically showing a conventional substrate transport device, and FIG. 2 is an enlarged explanatory diagram of a main part of FIG. 1. The substrate co...

AI Technical Summary

Problems solved by technology

In particular, since the tray will gradually strain due to friction or heat during use, it is necessary to correct the position deviation caused by these reasons. In the above-mentioned prior art, no such mechanism is provided.

[0012] In the presence of such a positional shift, the handling of the billet will also be affected

That is, if the billet is directly processed in a shifted state, a uniform product cannot be produced

[0013] And, although it is considered that the positioning is also performed in the processing device, when there are many kinds of processing devices, the positioning must be accurately performed in the processing device every time, so that a positioning mechanism suitable for the processing device has to be provided, very troublesome

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