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Article transport facility

An article conveying and article technology, which is applied in the field of article conveying equipment, can solve the problems of complicated structure, increased number of parts, increased installation space, etc.

Inactive Publication Date: 2007-03-07
DAIFUKU CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the number of parts installed on the side of the moving path increases, the installation space increases, and there is concern about complicating the configuration

Method used

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  • Article transport facility
  • Article transport facility
  • Article transport facility

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0037] The article conveying equipment in the first embodiment, as shown in FIGS. 1 and 2, is provided with a guide rail 2 as a moving path in a state passing through a plurality of article processing units 1, and is provided with a moving vehicle 3 as a conveying article The moving body can move freely along the guide rail 2. In addition, the container 5 accommodating the semiconductor substrate is used as an article, and the mobile vehicle 3 is configured to transport the container 5 between the plurality of article processing units 1. In the article processing section 1 described above, predetermined processing is performed on semi-finished products and the like in the semiconductor substrate manufacturing process.

[0038] The mobile vehicle 3 is provided with a liftable grip 4 that grips the container 5 in a suspended state, and the grip 4 constitutes a holding portion for holding the container 5.

[0039] As shown in FIG. 3, the above-mentioned gripping portion 4 is provided...

no. 2 Embodiment approach

[0090] Next, the article conveying equipment in the second embodiment will be described. This second embodiment shows another embodiment related to the support mechanism in the first embodiment described above.

[0091] Hereinafter, the configuration of the support mechanism in the second embodiment will be described based on FIGS. 10 to 14. The other configuration is the same as that of the first embodiment described above, so the description is omitted.

[0092] FIG. 10 is a perspective view showing the overall structure of an article support 42. 11 and 12 are perspective views when two article support bodies 42 are arranged side by side. In FIG. 11, when both article support bodies 42 are located at the article storage position, in FIG. 12, one article support body 42 is shown. When changing to a location for item transfer. In addition, in FIG. 13(A), a plan view of the upper part when the article support 42 is in the article storage position is shown, and in FIG. 13(B), the ar...

no. 3 Embodiment approach

[0118] Next, the article conveying equipment in the third embodiment will be described. In this third embodiment, another embodiment is shown with respect to the fixed frame and the sliding guide device in the second embodiment described above.

[0119] Hereinafter, the configuration of the fixed frame 74 and the slide guide device 70 in the third embodiment will be described based on FIGS. 16 to 21. Description of other configurations is omitted.

[0120] In FIG. 16, there is shown a perspective view when four article supports 68 are arranged in parallel, and in FIG. 17, an exploded perspective view in which the article supports 68 are removed from the fixed frame 74 is shown. In addition, FIG. 18 shows a perspective view when the article support 68 is in the article storage position, and FIG. 19 shows a perspective view when the article support 68 is displaced to the article transfer position. In addition, FIG. 20 shows a plan view when the article support 68 is in the article s...

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PUM

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Abstract

The present invention relates to an article conveying facility, comprising: a moving body for conveying articles, which is provided so as to be movable along a moving path, and an article holding part; and an article supporting body for storing articles, which can be in an article transfer position. and an article storage position, wherein the article delivery position is used to receive the article from the holding portion of the moving body and deliver the article to the holding portion; and an operating device is provided on the moving body for moving the The article support body is displaced between the article storage position and the article delivery position in a state where the body is stopped at the article transfer position corresponding to the article support body.

Description

Technical field [0001] The present invention relates to an article conveying equipment, which is provided with: a moving body for conveying articles, which is set to be able to move along a moving path, and is provided with an article holding part; and an article support for storing articles, which can be in an article transfer position (article transfer position) and Displacement between the article storage positions, where the article handover position is used to receive articles from the article holding part of the mobile body and deliver articles to the article holding part. Background technique [0002] The article conveying equipment as described above has a plurality of article transfer stations set as article transfer targets along a movement path, and the moving body moves along the movement path to carry articles between the stations. [0003] In addition, in order to temporarily store the articles conveyed to the station, an article support is provided. The article sup...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/04B65G47/74
CPCH01L21/67733H01L21/67706B65G2201/0297H01L21/67736H01L21/6773B65G47/5104B65G37/02Y10S414/14B65G1/0414
Inventor 乾吉隆
Owner DAIFUKU CO LTD
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