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Testing facilities for image sensor

An image sensor and test device technology, which can be applied to measurement devices, optical instrument testing, radiation control devices, etc., can solve the problem of insufficient miniaturization of test devices for image sensors, and achieve the effect of miniaturization and cost reduction.

Inactive Publication Date: 2007-03-07
ADVANTEST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Therefore, in the test device for image sensors, it is necessary to arrange the fine adjustment mechanism or a space for allowing the movement of the light source around the light source, and it is impossible to sufficiently reduce the size of the test device for image sensors.

Method used

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  • Testing facilities for image sensor
  • Testing facilities for image sensor
  • Testing facilities for image sensor

Examples

Experimental program
Comparison scheme
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Embodiment 2

[0322] 34A is a top plan view showing an image sensor as a test object of an image sensor test device according to Embodiment 2 of the present invention, FIG. 34B is a bottom plan view of the image sensor shown in FIG. 34A , and FIG. 34C is a view along VII- 35 is a schematic sectional view showing the contact arm and the test head of the image sensor test device according to Embodiment 2 of the present invention, and FIG. 36 is a schematic sectional view showing the contact of the image sensor test device according to Embodiment 2 of the present invention. 37 is a schematic cross-sectional view of an enlarged upper contact of the contact arm shown in FIGS. 35 and 36 , and FIG. 38 is a plan view of the upper contact shown in FIG. 37 .

[0323] First, in Embodiment 2 of the present invention, when describing the image sensor to be tested, the image sensor DUT', as shown in FIG. 34A to FIG. The CCD sensor or CMOS sensor of the terminal HB is similar to the image sensor DUT of th...

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Abstract

Test equipment for image sensor in which optical characteristics of an image sensor (DUT) are tested by inputting / outputting electric signals from a contact part to the input / output terminals of the image sensor while irradiating the light receiving surface of the image sensor (DUT) with light. The image sensor (DUT) gripped by means of a contact arm (315) is imaged through a first camera (326); relative position of the image sensor (DUT) to the contact part is recognized through image processing; alignment amount of the image sensor (DUT) is calculated from the relative position while considering a previously calculated shift of the optical axis of the image sensor (DUT) from the optical axis of a light source; a driving section (322) is driven according to the alignment amount; and under a state where a lock and free mechanism (318) is not locked, a grip side arm (317) in abutment with a movable stage (321) is moved.

Description

technical field [0001] The invention relates to electrically contacting the input and output terminals of an image sensor such as a CCD sensor or a CMOS sensor with a contact portion of a test head, and inputting and outputting electrical signals to the input and output terminals of the image sensor while irradiating light from a light source to the photosensitive surface of the image sensor. This is a testing device for image sensors that tests the optical characteristics of image sensors. Background technique [0002] In an electronic component testing device called a handler, a plurality of electronic components such as semiconductor integrated circuit components are stored in a tray and transported to the handler, so that each electronic component to be tested is electrically contacted with the test head, and the electronic Parts test equipment (hereinafter referred to as tester) for testing. Then, when the test is completed, each electronic component is taken out from ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00H01L27/14G01R31/26H01L27/146
CPCG01R31/2641G01M11/00H01L27/14618H01L2224/16225H04N17/002H04N23/57
Inventor 清川敏之
Owner ADVANTEST CORP
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