Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

MEMS stretching twisted fatigue feature testing apparatus

An experimental device, fatigue characteristics technology, applied in the direction of measuring device, using stable torsion to test the strength of materials, instruments, etc., can solve the problems of impossible completion, difficulty in clamping and centering micron-sized samples, and achieve easy processing , easy to obtain real experimental data, simple processing effect

Inactive Publication Date: 2007-04-18
BEIJING UNIV OF TECH
View PDF0 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method is not suitable for the study of MEMS fatigue characteristics. First, the driving methods of hydraulic pressure and electromagnetic force are not suitable for the state of micron size. impossible to complete

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • MEMS stretching twisted fatigue feature testing apparatus
  • MEMS stretching twisted fatigue feature testing apparatus
  • MEMS stretching twisted fatigue feature testing apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] Below in conjunction with accompanying drawing 1~5 specific embodiment of the present invention is described:

[0031] The main functions of this embodiment are realized by comb capacitors and parallel plate capacitors. According to the different roles played during the experiment, these two capacitors are divided into drivers and sensors. Wherein the driver includes: a comb capacitor driver as shown in 2 and 9 in 1 and a parallel plate capacitor driver as shown in 4 and 13 in 1. The sensors include: comb capacitive sensors as shown in 5 and 15 in Fig. 1 and parallel plate capacitive sensors as shown in Fig. 8 in 1 .

[0032] Each comb capacitive driver and sensor consists of two sets of alternating comb teeth. One set of comb teeth is fixed, and the corresponding set of comb teeth is suspended. The fixed comb parts of comb capacitive drivers 2, 9 and comb capacitive sensors 5, 15 in Fig. 1 are 402, 404 and 400, 406 in Fig. 4 . The suspended comb parts are 302, 306 ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to MEMS drawing torsion fatigue characteristic experimental apparatus. It includes parallel plate capacitance driver and transducer, comb type capacitance driver and transducer, earthed electrode, drawing and torsion driving electrodes, drawing and torsion detecting electrodes. While in experiment, the drawing and torsion driving electrodes are respectively supplied alternating current signal to parallel plate and comb type capacitance drivers to make the fatigue testing specimen suffer alternating drawing and torsion stress at the same time. The parallel plate and comb type capacitance transducers are electrified direct current respectively by drawing and torsion detecting electrodes to detect fatigue testing specimen drawing and torsion amplitude. The invention has the advantages of easy processing, convenient operation, and high use value for MEMS structural strength study.

Description

technical field [0001] The invention relates to a MEMS tensile torsion fatigue characteristic experimental device, which is used for the research on the fatigue characteristics of MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) polysilicon structure in a multi-axial stress environment, and belongs to the field of basic research on the characteristics of micro-nano scale materials . Background technique [0002] Studies have found that silicon, which is a brittle material in the macroscopic state, will produce fatigue characteristics at the micro-nano scale, and the mechanism of this change is not yet clear. Understanding this mechanism and measuring the fatigue characteristic parameters of silicon at the micron scale are of great significance for the reliability design and life prediction of MEMS. [0003] At the current scale that MEMS can reach, many physical phenomena are very different from the macroscopic world due to the impact of size reductio...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/22G01N3/08G01M19/00G01M99/00
Inventor 尚德广贾冠华李立森王瑞杰孙国芹邓静刘豪
Owner BEIJING UNIV OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com