Semiconductor device package and method of manufacturing the same
a semiconductor device and semiconductor technology, applied in the direction of microstructured devices, microstructured devices, testing/measurement of semiconductor/solid-state devices, etc., can solve the problems of semiconductor devices tilting, adversely affecting the performance of semiconductor device packages, and difficult control of bl
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[0018]FIG. 1A illustrates a semiconductor device package 1 in accordance with some embodiments of the present disclosure. The semiconductor device package 1 includes a substrate 10, a MEMS device 11 (or abbreviated as MEMS 11) and an adhesive 12.
[0019]The substrate 10 may be, for example, a printed circuit board (PCB), such as a paper-based copper foil laminate, a composite copper foil laminate, a polymer-impregnated glass-fiber-based copper foil laminate, or a combination of two or more thereof. The substrate 10 may include an interconnection structure, such as a redistribution layer (RDL) or a grounding element. The substrate 10 may include a through via 10v penetrating the substrate 10 to provide an electrical connection between a surface 101 (also referred to as a top surface or a first surface) of the substrate 10 and a surface 102 (also referred to as a bottom surface or a second surface) of the substrate. The substrate 10 defines an opening (or a gap) 10h penetrating the subs...
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