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Actuator Coupling System and a Pipetting Module Comprising Such a Coupling System

a technology of coupling system and actuator, which is applied in the direction of positive displacement liquid engine, instrument, glassware laboratory, etc., can solve the problems of limiting design flexibility, unable to produce forces sufficiently large to displace the membrane with sufficient precision, etc., and achieves a high degree of flexibility

Inactive Publication Date: 2006-12-14
ROCHE DIAGNOSTICS GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention is a coupling system that allows for the precise and secure attachment of a macroactuator to a micromachined device. The system includes a micromachined device with a movable element, a first body for holding a macroactuator, and a second body for mounting the micromachined device. The position of the macroactuator can be adjusted with high precision, and the attachment is stable and secure during operation. The coupling system also includes a pipetting module for displacing liquid volumes in the submicroliter range, which allows for the precise adjustment of the position of the macroactuator with respect to the micromachined device. The invention provides a flexible and adaptable solution for various micro-system applications.

Problems solved by technology

With this kind of actuator it is difficult to produce forces which are sufficiently large as to displace the membrane with sufficient precision, in particular when the size of the membrane and the size of the necessary deflection of the membrane have to be increased in order to be able to increase the volume to be pipetted.
Such a bonding is however disadvantageous, because it strongly limits flexibility of design of a pipetting module consisting of a micromachined pipetting device and a macroactuator connected thereto.

Method used

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  • Actuator Coupling System and a Pipetting Module Comprising Such a Coupling System
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  • Actuator Coupling System and a Pipetting Module Comprising Such a Coupling System

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Embodiment Construction

Micromechanical Pipetting Device

[0045]FIG. 1a shows schematically a silicon wafer 14 on which an array of micromechanical modules has been formed. Each of such modules can be used as a component of a micromechanical pipetting device 11.

[0046]FIG. 1b shows schematically a micromechanical pipetting device 11. Liquid volumes in the submicroliter and microliter range can be pipetted with such a device. Device 11 is an integrally built pipetting device comprising a micromechanical structure which is integrally built on a silicon wafer 14.

[0047] The micromechanical pipetting device 11 shown by FIG. 1b comprises three layers arranged one above the other and connected to one another unreleasably by means of anodic bonding or other bonding process e.g. silicon direct bonding as follows: a first glass or silicon layer 26, a second glass or silicon layer 27, and a silicon wafer layer 14 arranged between layers 26 and 27. Silicon wafer layer 14 is unreleasably connected to layers 26 and 27 ...

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Abstract

The present invention is directed a system for coupling a macroactuator to a movable element of a micromachined device. The system includes a micromachined device, a first body for holding a macroactuator, a macroactuator mechanically mounted on the first body, a second body having a bore for receiving the first body, a screw arrangement for fixing the axial position of the first body within the bore of the second body, and a plate arrangement for mounting the micromachined device on the second body. The plate arrangement is mounted in such a way that the macroactuator exerts a predetermined force or pressure on a movable element of the micromachined device. The present invention further is directed to a pipetting module that includes the micromachined device and the macroactuator.

Description

[0001] This application is a divisional of application Ser. No. 10 / 148,149.FIELD OF THE INVENTION [0002] The invention concerns a system for coupling a macroactuator to a movable element of a micromachined device. BACKGROUND OF THE INVENTION [0003] Within the scope of the invention, a macroactuator is any actuator that cannot be manufactured by a micromachining process and which can therefore not be integrated in a micromachined device where an actuator is needed. [0004] The invention also concerns a micropipetting module which comprises such a coupling system. [0005] European Patent Application EP-A 0865824 A1 describes a micromachined pipetting device wherein a membrane is moved by means of a micromachined electrostatic actuator. With this kind of actuator it is difficult to produce forces which are sufficiently large as to displace the membrane with sufficient precision, in particular when the size of the membrane and the size of the necessary deflection of the membrane have to b...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L21/00H01L29/82G01N1/00B01J4/02B01L3/00B01L3/02B01L9/00F04B43/04G01N35/00G01N35/10
CPCB01L3/0268B01L9/54B01L2200/146B01L2300/0809Y10T436/2575B01L2400/0481G01N35/10G01N2035/00237B01L2400/0439
Inventor SZITA, NICOLASBUSER, RUDOLFELSENHANS, OLIVIER
Owner ROCHE DIAGNOSTICS GMBH