Actuator Coupling System and a Pipetting Module Comprising Such a Coupling System
a technology of coupling system and actuator, which is applied in the direction of positive displacement liquid engine, instrument, glassware laboratory, etc., can solve the problems of limiting design flexibility, unable to produce forces sufficiently large to displace the membrane with sufficient precision, etc., and achieves a high degree of flexibility
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Micromechanical Pipetting Device
[0045]FIG. 1a shows schematically a silicon wafer 14 on which an array of micromechanical modules has been formed. Each of such modules can be used as a component of a micromechanical pipetting device 11.
[0046]FIG. 1b shows schematically a micromechanical pipetting device 11. Liquid volumes in the submicroliter and microliter range can be pipetted with such a device. Device 11 is an integrally built pipetting device comprising a micromechanical structure which is integrally built on a silicon wafer 14.
[0047] The micromechanical pipetting device 11 shown by FIG. 1b comprises three layers arranged one above the other and connected to one another unreleasably by means of anodic bonding or other bonding process e.g. silicon direct bonding as follows: a first glass or silicon layer 26, a second glass or silicon layer 27, and a silicon wafer layer 14 arranged between layers 26 and 27. Silicon wafer layer 14 is unreleasably connected to layers 26 and 27 ...
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