Piezoelectric thin film resonator and manufacturing method thereof
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[0039] hereinafter, examples will be described as embodiments according to the present invention with reference to FIG. 1. FIG. 1(a) is a cross-sectional view taken along the line A-A in FIG. 1(b), and FIG. 1(b) is a plan view.
[0040] As schematically shown in FIG. 1, a piezoelectric thin film resonator 10 is formed of a substrate 11 and a thin film member (membrane) provided thereon, the thin film member including a dielectric film 12, a lower electrode 14, a piezoelectric thin film 16, and an upper electrode 18. An airspace layer 13 (see FIG. 1(a)) is formed between the substrate 11 and the dielectric film 12. The dielectric film 12 includes support portions supported by the substrate 11 and a floating portion floating over the substrate 11. On the floating portion of the dielectric film 12 at a position opposite to the airspace layer 13, a vibration portion 19 floating over the substrate 11 is formed in a region in which the electrodes 14 and 18 are overlapped with each other. Th...
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