Polishing method for a workpiece and polishing tool used for the polishing method

US20110028074A1Inactive Publication Date: 2011-02-03CANON KK

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first embodiment

[0017]A polishing apparatus 100 illustrated in FIG. 1 performs processing, with use of a polishing tool 10 mounted to a polishing apparatus main body, on a surface of a workpiece W placed on an XY stage (not shown). The workpiece W has a surface Wa, which is a flat surface, a spherical surface, or a non-horizontal surface such as a non-axisymmetric free-form surface. The workpiece W is, for example, an optical element such as a lens or a mirror, or a die for molding an optical element. The polishing tool 10 includes a rotation shaft 1, and at least two disk-like polishing bodies 7, 8 provided to the rotation shaft 1 so as to be adjacent to each other. The rotation shaft 1 of the polishing tool 10 is fixed to a tool rotating device of the polishing apparatus 100, whereby the polishing tool 10 is supported to be rotatable relative to the polishing apparatus main body. The first polishing body 8 and the second polishing body 7 respectively have outer peripheral surfaces serving as work...

second embodiment

[0026]Next, a second embodiment of the present invention is described. FIG. 2A illustrates a polishing tool 11 according to the second embodiment. Portions identical to those of FIG. 1 are denoted by the same symbols, and description thereof is omitted. The polishing tool 11 includes the rotation shaft 1, and three disk-like polishing bodies 7, 8, and 9 provided to the rotation shaft 1 so as to be adjacent to each other. The rotation shaft 1 of the polishing tool 11 is fixed to the tool rotating device 3 of the polishing apparatus 100, whereby the polishing tool 11 is supported to be rotatable relative to the polishing apparatus main body. The first polishing body 8, the second polishing body 7, and the third polishing body 9 respectively have outer peripheral surfaces serving as working surfaces 8a, 7a, and 9a. The first polishing body 8, the second polishing body 7, and the third polishing body 9 are fixed onto the rotation shaft 1 passing through the center portion of each disk-l...

third embodiment

[0033]Next, a third embodiment of the present invention is described. FIG. 3A illustrates a polishing tool 12 according to the third embodiment. Portions identical to those of FIGS. 2A and 2B are denoted by the same symbols, and description thereof is omitted.

[0034]In FIG. 3A, multiple grooves 9b with a depth (for example, 0.35 mm) of from 0.1 mm to a size corresponding to the thickness of the polishing body 9 are formed in the outer peripheral surface 9a of the polishing body 9 at intervals of 2° or less in a direction parallel to the rotation shaft. In the case where the depth of each of the grooves is extremely shallow, when the polishing body 9 is pressed, the polishing body 9 is deformed so that bottoms of the grooves are brought into contact with the surface Wa of the workpiece W. Thus, the polishing body 9 cannot exert an effect of the grooves. The multiple grooves 9b are formed in the outer peripheral surface 9a of the polishing body 9, and hence it is possible to suppress f...

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Abstract

Provided is a polishing tool capable of forming a high-quality surface of a workpiece for a short period of time. A polishing tool includes: a rotation shaft arranged parallel to a sending direction of moving the polishing tool relative to a workpiece; and at least two polishing bodies. The polishing body includes a foamed resin such as a foamed polyurethane resin, and has an outer peripheral surface having a porosity higher than that of the polishing body. The polishing body includes a non-foamed resin such as a non-foamed polyurethane resin being a material more rigid than that for the polishing body. When polishing-processing, the polishing body performs polishing removal on a surface of the workpiece, and the polishing body smoothes a waviness formed on the surface through the polishing removal.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a polishing method and a polishing tool used for polishing workpieces including an optical element such as a lens or a mirror, and a die for molding an optical element.[0003]2. Description of the Related Art[0004]Nowadays, in a case of finish-polishing a surface shape of a so-called non-axisymmetric free-form surface different in curvature at each point of a workpiece including an optical element such as a lens or a mirror, and a die for molding an optical element, the polishing-processing is performed with use of a polishing tool having a contact area smaller than an area of a surface of the workpiece. The polishing tool has a configuration having a disk-like polishing body provided onto a rotation shaft, and is mounted to a polishing apparatus. When the polishing-processing is performed by the polishing tool of this type, an outer peripheral surface of the polishing body is brought int...

Claims

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Application Information

Patent Timeline

03 Feb 2011

Publication

US20110028074A1

IPC: B24B1/00

CPC: B24B27/0076; B24D5/066; B24B41/002; B24D13/02; B24D13/20; B24D5/10

Inventors: MASUYAMA, KENICHI